Design and analysis of 1-DOF nano-positioning stage

被引：0
|
作者：
School of Mechantronic Engineering, Wuhan University of Technology, Wuhan 430070, China [1 ]
不详 [2 ]
机构：
来源：
Wuhan Ligong Daxue Xuebao | 2007年 / 1卷 / 62-64期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
A novel 1-DOF displacement stage with large motion range and nano-positioning precision was developed. The stage was a set of two grades mechanism, that was coarse and fine positioning mechanism. A diffraction grating was fixed to the stage to form a close loop displacement measuring system. The theory of mechanics was used to analysis the behavior of PZT actuated and flexure hinge guided fine positioning mechanism and the finite element analysis was also performed. The stage was used in the profiler of white-light interferometry successfully. A measuring example was also presented.
引用
收藏
页码：62 / 64
相关论文
共 50 条
  • [1] Design of a Compact 1-DOF Piezo-Driven Flexure Stage for Vertical Micro/Nano-Positioning
    Wu, Zeyi
    Xu, Qingsong
    2018 IEEE 8TH ANNUAL INTERNATIONAL CONFERENCE ON CYBER TECHNOLOGY IN AUTOMATION, CONTROL, AND INTELLIGENT SYSTEMS (IEEE-CYBER), 2018, : 208 - 213
  • [2] Design of a Topology Nano-positioning Stage
    Chen, Tao
    Chen, Liguo
    Pan, Mingqiang
    Sun, Lining
    MECHATRONICS AND INTELLIGENT MATERIALS, PTS 1 AND 2, 2011, 211-212 : 891 - 894
  • [3] Characteristics of a Decoupled 2-DOF Nano-positioning Stage
    Wang, Fujun
    Huo, Zhichen
    Tian, Yanling
    Zhang, Dawei
    2018 IEEE 8TH ANNUAL INTERNATIONAL CONFERENCE ON CYBER TECHNOLOGY IN AUTOMATION, CONTROL, AND INTELLIGENT SYSTEMS (IEEE-CYBER), 2018, : 214 - 218
  • [4] Structural Design and Analysis of a Nano-Positioning Planar Motion Stage
    Chung, Tien-Tung
    Chu, Chih-Hsiang
    Chian, Hsun-Fu
    Huang, Cheng
    Fan, Kuang-Chao
    Yen, Jia-Yush
    Szu, Kou-I
    2011 9TH WORLD CONGRESS ON INTELLIGENT CONTROL AND AUTOMATION (WCICA 2011), 2011, : 833 - 838
  • [5] The Design of Kalman Filter for Nano-Positioning Stage
    Dai, Jing
    Qu, Peng
    Shao, Meng
    Zhang, Hui
    Mao, Yongming
    HARMONY SEARCH ALGORITHM, 2016, 382 : 69 - 75
  • [6] Analysis and design for the nano-positioning XY stage based on the MEMS technology
    Sun, Lining
    Wang, Jiachou
    Rong, Weibin
    Chen, Liguo
    2007 IEEE INTERNATIONAL CONFERENCE ON MECHATRONICS AND AUTOMATION, VOLS I-V, CONFERENCE PROCEEDINGS, 2007, : 1489 - 1494
  • [7] Design and Analysis of an In-Plane Flexure XYZ Micro/Nano-Positioning Stage
    Zhang, Xiaozhi
    Xu, Qingsong
    IEEE ICARM 2016 - 2016 INTERNATIONAL CONFERENCE ON ADVANCED ROBOTICS AND MECHATRONICS (ICARM), 2016, : 359 - 363
  • [8] Analysis of Bridge-type Nano-positioning Stage
    Ma, Li
    He, Zhengfeng
    Ouyang, Hangkong
    FRONTIERS OF MANUFACTURING AND DESIGN SCIENCE, PTS 1-4, 2011, 44-47 : 3828 - 3832
  • [9] Design of Linear Motor Driving System for Nano-positioning Stage
    Ma, Shuyuan
    Xie, Hu
    Li, Wenbin
    Sun, Zhenning
    PROCEEDINGS 2013 INTERNATIONAL CONFERENCE ON MECHATRONIC SCIENCES, ELECTRIC ENGINEERING AND COMPUTER (MEC), 2013, : 3612 - 3616
  • [10] The design and new controller of a 1-DOF precision positioning platform
    Li Xiaochen
    Tian Yanling
    2013 INTERNATIONAL CONFERENCE ON MANIPULATION, MANUFACTURING AND MEASUREMENT ON THE NANOSCALE (3M-NANO), 2013, : 190 - 194
12345