Preparation of ferroelectric thick film actuator on silicon substrate by screen-printing

被引：0

作者：

Futakuchi, Tomoaki ^{[1
]}

Yamano, Hiroshi ^{[2
]}

Adachi, Masatoshi ^{[2
]}

机构：

[1] Toyama Industrial Technology Center, 383 Takada, Toyama 930-0866, Japan

[2] Department of Electronics and Informatics, Faculty of Engineering, Toyama Prefectural University, Kosugi-machi, Toyama 939-0398, Japan

来源：

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 2001年 / 40卷 / 9 B期

关键词：

Screen-printing methods;

D O I：

10.1143/jjap.40.5687

中图分类号：

学科分类号：

摘要：

引用

页码：5687 / 5689