An ultrasensitive flexible force sensor with nature-inspired minimalistic architecture to achieve a detection resolution and threshold of 1 mN for underwater applications

被引:7
作者
Cao, Peilin [1 ]
Wang, Cong [1 ]
Niu, Shichao [2 ,3 ]
Han, Zhiwu [2 ,3 ]
Liu, Linpeng [1 ]
Duan, Ji'an [1 ]
机构
[1] Cent South Univ, Coll Mech & Elect Engn, State Key Lab Precis Mfg Extreme Serv Performance, Changsha 410083, Peoples R China
[2] Jilin Univ, Key Lab Bion Engn, Minist Educ, Changchun 130022, Peoples R China
[3] Liaoning Acad Mat, Inst Struct & Architected Mat, Shenyang 110167, Peoples R China
基金
中国国家自然科学基金; 国家重点研发计划;
关键词
Force sensors; Nature-inspired; Minimalistic architecture; High sensitivity; Underwater detection; TACTILE SENSOR; STRAIN SENSOR; SENSITIVITY;
D O I
10.1016/j.mser.2024.100862
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Highly sensitive flexible force sensors enable precise detection of underwater signals for monitoring biological activity, environmental conditions, and vehicle movement. Multilayer stack assembly and micro/nano structure array are often seen in most force/pressure sensors which are toughly hard to control the interlayer spacing and micro/nano structures alignment precisely, resulting in poor consistency and stability. Herein, we first reported a new force sensor with a nature-inspired minimalistic architecture, addressing such issues in an elegant and surprising approach by using a single-layer arched functional membrane with one microgroove. Inspired by the scorpions' slit sensilla and mantis' campaniform sensilla, a highly sensitive and waterproof flexible force sensor was fabricated. It is demonstrated that the force sensor has a sensitivity of 27.6 N-1, a high force resolution (1 mN), a fast response time of 70 ms, excellent stability over 5000 cycles and linearity (0.996), and a small force detection limit (<= 1 mN), showing great potential in underwater environment sensing and motion monitoring of vehicles. This novel but minimalistic architecture provides a new direction in the development of sensors with advanced performance.
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页数:11
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