Nonlinear error analysis of laser synthetic-wavelength nanomeasurement interferometer

被引：3

作者：

Laboratory of Nanometer Measurement, Zhejiang Sci-Tech University, Hangzhou 310018, China ^{[1
]}

不详 ^{[2
]}

机构：

[1] Laboratory of Nanometer Measurement, Zhejiang Sci-Tech University

[2] State Key Laboratory of Precision Measurement Technology and Instruments, Tsinghua University

来源：

Zhongguo Jiguang/Chinese Journal of Lasers | 2008年 / 35卷 / 02期

关键词：

Interferometer; Measurement; Nonlinearity error; Nonorthogonal polarization; Synthetic-wavelength;

D O I：

10.3788/CJL20083502.0240

中图分类号：

学科分类号：

摘要：

The principle of laser synthetic-wavelength nanomeasurement interferometer is described. The nonlinear errors which affect on this interferometer are analyzed. Theoretical analysis results show that nonlinear errors caused by nonorthogonal polarization, elliptic polarization of laser source, nonideal polarization beam splitter and corner prism are second or higher order polarization error, the comparable experiment of laser synthetic-wavelength nanomeasurement interferometer and a heterodyne interferometer was performed. The maximal error of laser synthetic-wavelength nanomeasurement interferometer is 2.1 nm, while the maximal error of heterodyne interferometer is 7.5 nm.

引用

页码：240 / 244

页数：4

共 11 条

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