Atmosphere pressure plasma cleaning of grease contamination on sol-gel SiO2 coating

被引：0

作者：

Liu, Hao ^{[1
]}

Miao, Xinxiang ^{[1
]}

Yang, Ke ^{[1
]}

Lü, Haibing ^{[1
]}

Zou, Rui ^{[1
]}

Zhou, Guorui ^{[1
]}

Cheng, Xiaofeng ^{[1
]}

Yan, Hongwei ^{[1
]}

Yuan, Xiaodong ^{[1
]}

Jia, Baoshen ^{[1
]}

机构：

[1] Research Center of Laser Fusion, CAEP, P. O. Box 919-988, Mianyang

来源：

Qiangjiguang Yu Lizishu/High Power Laser and Particle Beams | 2015年 / 27卷 / 11期

关键词：

Atmosphere pressure plasma jet; Grease contamination; Laser induced damage threshold; Sol-gel SiO[!sub]2[!/sub] coating; Vacuum system of high power laser;

D O I：

10.11884/HPLPB201527.112008

中图分类号：

学科分类号：

摘要：

Atmosphere pressure plasma cleaning was utilized to clean grease contamination on the surface of sol-gel SiO2 coating on K9 glass. The optical property and laser-induced damage threshold of sol-gel coating were investigated by spectrophotometer, scanning electrical microscope and infrared spectrometer, respectively. After cleaning, the laser-induced damage threshold increased from 16.08 J/cm2 to 24.41 J/cm2 with irradiated by 1064 nm, approximate to the laser-induced damage threshold before pollution. The experimental results showed that the grease contamination on the sol-gel SiO2 coating could be well cleaned by atmosphere pressure plasma jet without the coating damaged and contamination residual by properly controlling the technological parameters. © 2015, Editorial Office of High Power Laser and Particle Beams. All right reserved.

引用

页数：6

共 17 条

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