The oxidation behavior of Ti5Si3, TiSi2, and (TiSi2)91Al9 alloys was studied over the temperature range of 800 ~ 1000 °C in dry air. In general, the oxidation kinetics of the three alloys followed the parabolic-rate law, indicating that diffusion was the rate-determining step during oxidation. The oxidation rate constants (kp values) gradually increased with increasing temperature but decreased with increasing Si content. It was found that the addition of Si content can improve the oxidation resistance of Ti-Si alloy. In addition, the scales formed on the (TiSi2)91Al9 alloy consisted mostly of α-Al2O3, of which the formation was responsible for the further improvement on oxidation resistance.