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Combining High Thermal Stability of MnNi Antiferromagnets With High-Performance MgO-TMR Sensors Through Texture Engineering With Ion Beam Assisted Deposition
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作者:

Araujo, Pedro D. R.
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h-index: 0
机构:
Inst Engn Sistemas E Computadores Microsistemas &, Lisbon P-, Portugal
Univ Lisbon, Inst Super Tecn, P-1000029 Lisbon, Portugal Inst Engn Sistemas E Computadores Microsistemas &, Lisbon P-, Portugal

Macedo, Rita
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Inst Engn Sistemas E Computadores Microsistemas &, Lisbon P-, Portugal Inst Engn Sistemas E Computadores Microsistemas &, Lisbon P-, Portugal

Pereira, Marta
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Inst Engn Sistemas E Computadores Microsistemas &, Lisbon P-, Portugal Inst Engn Sistemas E Computadores Microsistemas &, Lisbon P-, Portugal

Fernandes, Tiago P.
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Inst Engn Sistemas E Computadores Microsistemas &, Lisbon P-, Portugal Inst Engn Sistemas E Computadores Microsistemas &, Lisbon P-, Portugal

Cardoso, Susana
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机构:
Inst Engn Sistemas E Computadores Microsistemas &, Lisbon P-, Portugal
Univ Lisbon, Inst Super Tecn, P-1000029 Lisbon, Portugal Inst Engn Sistemas E Computadores Microsistemas &, Lisbon P-, Portugal
机构:
[1] Inst Engn Sistemas E Computadores Microsistemas &, Lisbon P-, Portugal
[2] Univ Lisbon, Inst Super Tecn, P-1000029 Lisbon, Portugal
关键词:
Sensors;
Temperature sensors;
Nonhomogeneous media;
Magnetic sensors;
Films;
Tunneling magnetoresistance;
Sensitivity;
Ion beams;
Sensor phenomena and characterization;
Annealing;
exchange bias;
ion beam assisted deposition (IBAD);
MnNi antiferromagnet (AFM);
tunneling magnetoresistive (TMR) sensors;
BLOCKING TEMPERATURE DISTRIBUTION;
MAGNETIC TUNNEL-JUNCTIONS;
STRUCTURAL CHARACTERISTICS;
SPIN VALVES;
FIELD;
IMPACT;
D O I:
10.1109/LSENS.2024.3482120
中图分类号:
TM [电工技术];
TN [电子技术、通信技术];
学科分类号:
0808 ;
0809 ;
摘要:
Tunneling magnetoresistive (TMR) sensors with enhancedthermal resilience are being pursued for harsh environmentapplications. In this letter, we explore MnNi as a possible candidatefor exchange bias in TMR sensor multilayers. We use ion beamassisted deposition for MnNi layer growth. A significant emergence ofexchange bias field of mu 0Hex=110 mT was obtained in MnNi/CoFebilayers against the ion beam deposited counterpart. In addition, wedemonstrate for the first time in literature the compatibility with state-of-the-art sensor multilayers comprising syntheticantiferromagnets and MgO tunnel barriers. The optimized device shows a tunneling magnetoresistance ratio of 130%atRT and a 30%at 300 degrees C corresponding to sensitivities of 17.0 and 9.5%/mT with well-defined parallel/antiparallel plateausin the full-temperature operation window.
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共 29 条
[1]
Engineering buffer layers to improve temperature resilience of magnetic tunnel junction sensors
[J].
Araujo, P. D. R.
;
Macedo, R.
;
Paz, E.
;
Cardoso, S.
;
Leitao, D. C.
;
Freitas, P. P.
.
NANOTECHNOLOGY,
2023, 34 (43)

Araujo, P. D. R.
论文数: 0 引用数: 0
h-index: 0
机构:
Inst Engn Sistemas & Comp Microsistemas & Nanotecn, Lisbon, Portugal
Univ Lisbon, Inst Super Tecn, Ave Rovisco Pais, P-1000029 Lisbon, Portugal Inst Engn Sistemas & Comp Microsistemas & Nanotecn, Lisbon, Portugal

Macedo, R.
论文数: 0 引用数: 0
h-index: 0
机构:
Inst Engn Sistemas & Comp Microsistemas & Nanotecn, Lisbon, Portugal Inst Engn Sistemas & Comp Microsistemas & Nanotecn, Lisbon, Portugal

Paz, E.
论文数: 0 引用数: 0
h-index: 0
机构:
INL Int Iberian Nanotechnol Lab, P-4715330 Braga, Portugal Inst Engn Sistemas & Comp Microsistemas & Nanotecn, Lisbon, Portugal

Cardoso, S.
论文数: 0 引用数: 0
h-index: 0
机构:
Inst Engn Sistemas & Comp Microsistemas & Nanotecn, Lisbon, Portugal
Univ Lisbon, Inst Super Tecn, Ave Rovisco Pais, P-1000029 Lisbon, Portugal Inst Engn Sistemas & Comp Microsistemas & Nanotecn, Lisbon, Portugal

Leitao, D. C.
论文数: 0 引用数: 0
h-index: 0
机构:
Eindhoven Univ Technol, Dept Appl Phys, POB 513, NL-5600 MB Eindhoven, Netherlands Inst Engn Sistemas & Comp Microsistemas & Nanotecn, Lisbon, Portugal

Freitas, P. P.
论文数: 0 引用数: 0
h-index: 0
机构:
Inst Engn Sistemas & Comp Microsistemas & Nanotecn, Lisbon, Portugal
INL Int Iberian Nanotechnol Lab, P-4715330 Braga, Portugal Inst Engn Sistemas & Comp Microsistemas & Nanotecn, Lisbon, Portugal
[2]
Impact of the Synthetic Antiferromagnet in TMR Sensors for Improved Angular- Dependent Output
[J].
Araujo, Pedro D. R.
;
Paz, Elvira
;
Benetti, Luana
;
Cadugan, Bryan
;
Ferreira, Ricardo
;
Cardoso, Susana
;
Leitao, Diana C.
;
Freitas, Paulo P.
.
IEEE SENSORS JOURNAL,
2024, 24 (11)
:17588-17595

Araujo, Pedro D. R.
论文数: 0 引用数: 0
h-index: 0
机构:
Inst Engn Sistemas & Comp Microsistemas & Nanotecn, P-1000029 Lisbon, Portugal
Univ Lisbon, Inst Super Tecn, P-1000029 Lisbon, Portugal Inst Engn Sistemas & Comp Microsistemas & Nanotecn, P-1000029 Lisbon, Portugal

Paz, Elvira
论文数: 0 引用数: 0
h-index: 0
机构:
Int Iberian Nanotechnol Lab INL, P-4715330 Braga, Portugal Inst Engn Sistemas & Comp Microsistemas & Nanotecn, P-1000029 Lisbon, Portugal

Benetti, Luana
论文数: 0 引用数: 0
h-index: 0
机构:
Int Iberian Nanotechnol Lab INL, P-4715330 Braga, Portugal Inst Engn Sistemas & Comp Microsistemas & Nanotecn, P-1000029 Lisbon, Portugal

Cadugan, Bryan
论文数: 0 引用数: 0
h-index: 0
机构:
Allegro Microsyst, Manchester, NH 03103 USA Inst Engn Sistemas & Comp Microsistemas & Nanotecn, P-1000029 Lisbon, Portugal

Ferreira, Ricardo
论文数: 0 引用数: 0
h-index: 0
机构:
Int Iberian Nanotechnol Lab INL, P-4715330 Braga, Portugal Inst Engn Sistemas & Comp Microsistemas & Nanotecn, P-1000029 Lisbon, Portugal

Cardoso, Susana
论文数: 0 引用数: 0
h-index: 0
机构:
Inst Engn Sistemas & Comp Microsistemas & Nanotecn, P-1000029 Lisbon, Portugal Inst Engn Sistemas & Comp Microsistemas & Nanotecn, P-1000029 Lisbon, Portugal

Leitao, Diana C.
论文数: 0 引用数: 0
h-index: 0
机构:
Eindhoven Univ Technol, Dept Appl Phys, NL-5612 AZ Eindhoven, Netherlands Inst Engn Sistemas & Comp Microsistemas & Nanotecn, P-1000029 Lisbon, Portugal

Freitas, Paulo P.
论文数: 0 引用数: 0
h-index: 0
机构:
Inst Engn Sistemas & Comp Microsistemas & Nanotecn, P-1000029 Lisbon, Portugal
Int Iberian Nanotechnol Lab INL, P-4715330 Braga, Portugal Inst Engn Sistemas & Comp Microsistemas & Nanotecn, P-1000029 Lisbon, Portugal
[3]
Ion beam assisted deposition of MgO barriers for magnetic tunnel junctions
[J].
Cardoso, S.
;
Macedo, R. J.
;
Ferreira, R.
;
Augusto, A.
;
Wisniowski, P.
;
Freitas, P. P.
.
JOURNAL OF APPLIED PHYSICS,
2008, 103 (07)

Cardoso, S.
论文数: 0 引用数: 0
h-index: 0
机构:
INESC MN, P-1000029 Lisbon, Portugal
Univ Tecn Lisboa, Dept Fis, Inst Super Tecn, P-1000 Lisbon, Portugal INESC MN, P-1000029 Lisbon, Portugal

Macedo, R. J.
论文数: 0 引用数: 0
h-index: 0
机构:
INESC MN, P-1000029 Lisbon, Portugal
Univ Tecn Lisboa, Dept Fis, Inst Super Tecn, P-1000 Lisbon, Portugal INESC MN, P-1000029 Lisbon, Portugal

Ferreira, R.
论文数: 0 引用数: 0
h-index: 0
机构:
INESC MN, P-1000029 Lisbon, Portugal
Univ Tecn Lisboa, Dept Fis, Inst Super Tecn, P-1000 Lisbon, Portugal INESC MN, P-1000029 Lisbon, Portugal

Augusto, A.
论文数: 0 引用数: 0
h-index: 0
机构:
INESC MN, P-1000029 Lisbon, Portugal
Univ Tecn Lisboa, Dept Fis, Inst Super Tecn, P-1000 Lisbon, Portugal INESC MN, P-1000029 Lisbon, Portugal

Wisniowski, P.
论文数: 0 引用数: 0
h-index: 0
机构:
INESC MN, P-1000029 Lisbon, Portugal
Univ Tecn Lisboa, Dept Fis, Inst Super Tecn, P-1000 Lisbon, Portugal INESC MN, P-1000029 Lisbon, Portugal

Freitas, P. P.
论文数: 0 引用数: 0
h-index: 0
机构:
INESC MN, P-1000029 Lisbon, Portugal
Univ Tecn Lisboa, Dept Fis, Inst Super Tecn, P-1000 Lisbon, Portugal INESC MN, P-1000029 Lisbon, Portugal
[4]
Quantitative interpretation of the magnetoresistive response (amplitude and shape) of spin valves with synthetic antiferromagnetic pinned layers
[J].
Dieny, B
;
Li, M
;
Liao, SH
;
Horng, C
;
Ju, K
.
JOURNAL OF APPLIED PHYSICS,
2000, 87 (07)
:3415-3420

Dieny, B
论文数: 0 引用数: 0
h-index: 0
机构:
CEA Grenoble, Dept Rech Fondamentale Mat Condensee, F-38054 Grenoble 9, France CEA Grenoble, Dept Rech Fondamentale Mat Condensee, F-38054 Grenoble 9, France

Li, M
论文数: 0 引用数: 0
h-index: 0
机构: CEA Grenoble, Dept Rech Fondamentale Mat Condensee, F-38054 Grenoble 9, France

Liao, SH
论文数: 0 引用数: 0
h-index: 0
机构: CEA Grenoble, Dept Rech Fondamentale Mat Condensee, F-38054 Grenoble 9, France

Horng, C
论文数: 0 引用数: 0
h-index: 0
机构: CEA Grenoble, Dept Rech Fondamentale Mat Condensee, F-38054 Grenoble 9, France

Ju, K
论文数: 0 引用数: 0
h-index: 0
机构: CEA Grenoble, Dept Rech Fondamentale Mat Condensee, F-38054 Grenoble 9, France
[5]
Influence of ion beam assisted deposition parameters on the growth of MgO and CoFeB
[J].
Ferreira, Ricardo
;
Cardoso, Susana
;
Freitas, Paulo P.
;
Petrova, Rumyana
;
McVitie, Stephen
.
JOURNAL OF APPLIED PHYSICS,
2012, 111 (07)

Ferreira, Ricardo
论文数: 0 引用数: 0
h-index: 0
机构:
INESC MN Inst Nanosci & Nanotechnol, P-1000029 Lisbon, Portugal INESC MN Inst Nanosci & Nanotechnol, P-1000029 Lisbon, Portugal

Cardoso, Susana
论文数: 0 引用数: 0
h-index: 0
机构:
INESC MN Inst Nanosci & Nanotechnol, P-1000029 Lisbon, Portugal
IST, P-1049001 Lisbon, Portugal INESC MN Inst Nanosci & Nanotechnol, P-1000029 Lisbon, Portugal

Freitas, Paulo P.
论文数: 0 引用数: 0
h-index: 0
机构:
INESC MN Inst Nanosci & Nanotechnol, P-1000029 Lisbon, Portugal
IST, P-1049001 Lisbon, Portugal
Univ Glasgow, Sch Phys & Astron, Glasgow G12 8QQ, Lanark, Scotland INESC MN Inst Nanosci & Nanotechnol, P-1000029 Lisbon, Portugal

Petrova, Rumyana
论文数: 0 引用数: 0
h-index: 0
机构:
Univ Glasgow, Sch Phys & Astron, Glasgow G12 8QQ, Lanark, Scotland INESC MN Inst Nanosci & Nanotechnol, P-1000029 Lisbon, Portugal

McVitie, Stephen
论文数: 0 引用数: 0
h-index: 0
机构:
Univ Glasgow, Sch Phys & Astron, Glasgow G12 8QQ, Lanark, Scotland INESC MN Inst Nanosci & Nanotechnol, P-1000029 Lisbon, Portugal
[6]
Magnetic and structural characteristics of exchange biasing systems based on NiMn antiferromagnetic films
[J].
Groudeva-Zotova, S
;
Elefant, D
;
Kaltofen, R
;
Tietjen, D
;
Thomas, J
;
Hoffmann, V
;
Schneider, CM
.
JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS,
2003, 263 (1-2)
:57-71

Groudeva-Zotova, S
论文数: 0 引用数: 0
h-index: 0
机构:
IFW Dresden, IFF, Leiden Inst Solid State Phys, D-01069 Dresden, Germany IFW Dresden, IFF, Leiden Inst Solid State Phys, D-01069 Dresden, Germany

Elefant, D
论文数: 0 引用数: 0
h-index: 0
机构:
IFW Dresden, IFF, Leiden Inst Solid State Phys, D-01069 Dresden, Germany IFW Dresden, IFF, Leiden Inst Solid State Phys, D-01069 Dresden, Germany

Kaltofen, R
论文数: 0 引用数: 0
h-index: 0
机构:
IFW Dresden, IFF, Leiden Inst Solid State Phys, D-01069 Dresden, Germany IFW Dresden, IFF, Leiden Inst Solid State Phys, D-01069 Dresden, Germany

Tietjen, D
论文数: 0 引用数: 0
h-index: 0
机构:
IFW Dresden, IFF, Leiden Inst Solid State Phys, D-01069 Dresden, Germany IFW Dresden, IFF, Leiden Inst Solid State Phys, D-01069 Dresden, Germany

Thomas, J
论文数: 0 引用数: 0
h-index: 0
机构:
IFW Dresden, IFF, Leiden Inst Solid State Phys, D-01069 Dresden, Germany IFW Dresden, IFF, Leiden Inst Solid State Phys, D-01069 Dresden, Germany

Hoffmann, V
论文数: 0 引用数: 0
h-index: 0
机构:
IFW Dresden, IFF, Leiden Inst Solid State Phys, D-01069 Dresden, Germany IFW Dresden, IFF, Leiden Inst Solid State Phys, D-01069 Dresden, Germany

Schneider, CM
论文数: 0 引用数: 0
h-index: 0
机构:
IFW Dresden, IFF, Leiden Inst Solid State Phys, D-01069 Dresden, Germany IFW Dresden, IFF, Leiden Inst Solid State Phys, D-01069 Dresden, Germany
[7]
NiMn/FeNi exchange biasing systems-magnetic and structural characteristics after short annealing close to the phase transition point of the AFM layer
[J].
Groudeva-Zotova, S
;
Elefant, D
;
Kaltofen, R
;
Thomas, J
;
Schneider, CM
.
JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS,
2004, 278 (03)
:379-391

Groudeva-Zotova, S
论文数: 0 引用数: 0
h-index: 0
机构:
Leibniz Inst Solid State & Mat Res Dresden, D-01069 Dresden, Germany Leibniz Inst Solid State & Mat Res Dresden, D-01069 Dresden, Germany

论文数: 引用数:
h-index:
机构:

Kaltofen, R
论文数: 0 引用数: 0
h-index: 0
机构:
Leibniz Inst Solid State & Mat Res Dresden, D-01069 Dresden, Germany Leibniz Inst Solid State & Mat Res Dresden, D-01069 Dresden, Germany

Thomas, J
论文数: 0 引用数: 0
h-index: 0
机构:
Leibniz Inst Solid State & Mat Res Dresden, D-01069 Dresden, Germany Leibniz Inst Solid State & Mat Res Dresden, D-01069 Dresden, Germany

Schneider, CM
论文数: 0 引用数: 0
h-index: 0
机构:
Leibniz Inst Solid State & Mat Res Dresden, D-01069 Dresden, Germany Leibniz Inst Solid State & Mat Res Dresden, D-01069 Dresden, Germany
[8]
Review on spintronics: Principles and device applications
[J].
Hirohata, Atsufumi
;
Yamada, Keisuke
;
Nakatani, Yoshinobu
;
Prejbeanu, Ioan-Lucian
;
Dieny, Bernard
;
Pirro, Philipp
;
Hillebrands, Burkard
.
JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS,
2020, 509

Hirohata, Atsufumi
论文数: 0 引用数: 0
h-index: 0
机构:
Univ York, Dept Elect Engn, York YO10 5DD, N Yorkshire, England Univ York, Dept Elect Engn, York YO10 5DD, N Yorkshire, England

Yamada, Keisuke
论文数: 0 引用数: 0
h-index: 0
机构:
Gifu Univ, Dept Chem & Biomol Sci, Gifu 5011112, Japan Univ York, Dept Elect Engn, York YO10 5DD, N Yorkshire, England

Nakatani, Yoshinobu
论文数: 0 引用数: 0
h-index: 0
机构:
Univ Electrocommun, Grad Sch Informat & Engn, Chofu, Tokyo 1828585, Japan Univ York, Dept Elect Engn, York YO10 5DD, N Yorkshire, England

Prejbeanu, Ioan-Lucian
论文数: 0 引用数: 0
h-index: 0
机构:
Univ Grenoble Alpes, SPINTEC, CEA, CNRS, F-38000 Grenoble, France Univ York, Dept Elect Engn, York YO10 5DD, N Yorkshire, England

Dieny, Bernard
论文数: 0 引用数: 0
h-index: 0
机构:
Univ Grenoble Alpes, SPINTEC, CEA, CNRS, F-38000 Grenoble, France Univ York, Dept Elect Engn, York YO10 5DD, N Yorkshire, England

论文数: 引用数:
h-index:
机构:

论文数: 引用数:
h-index:
机构:
[9]
Magnetotransport properties and thermal stability of magnetic tunnel junctions with wave resonance plasma oxidized barrier
[J].
Kaltofen, R
;
Mönch, I
;
Schumann, J
;
Elefant, D
;
Zotova, S
;
Thomas, J
;
Vinzelberg, H
.
JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS,
2005, 290 (290-291 PART 2)
:1146-1149

Kaltofen, R
论文数: 0 引用数: 0
h-index: 0
机构:
Leibniz Inst Solid State & Mat Res Dresden, D-01069 Dresden, Germany Leibniz Inst Solid State & Mat Res Dresden, D-01069 Dresden, Germany

Mönch, I
论文数: 0 引用数: 0
h-index: 0
机构:
Leibniz Inst Solid State & Mat Res Dresden, D-01069 Dresden, Germany Leibniz Inst Solid State & Mat Res Dresden, D-01069 Dresden, Germany

Schumann, J
论文数: 0 引用数: 0
h-index: 0
机构:
Leibniz Inst Solid State & Mat Res Dresden, D-01069 Dresden, Germany Leibniz Inst Solid State & Mat Res Dresden, D-01069 Dresden, Germany

论文数: 引用数:
h-index:
机构:

Zotova, S
论文数: 0 引用数: 0
h-index: 0
机构:
Leibniz Inst Solid State & Mat Res Dresden, D-01069 Dresden, Germany Leibniz Inst Solid State & Mat Res Dresden, D-01069 Dresden, Germany

Thomas, J
论文数: 0 引用数: 0
h-index: 0
机构:
Leibniz Inst Solid State & Mat Res Dresden, D-01069 Dresden, Germany Leibniz Inst Solid State & Mat Res Dresden, D-01069 Dresden, Germany

Vinzelberg, H
论文数: 0 引用数: 0
h-index: 0
机构:
Leibniz Inst Solid State & Mat Res Dresden, D-01069 Dresden, Germany Leibniz Inst Solid State & Mat Res Dresden, D-01069 Dresden, Germany
[10]
Large exchange bias and high blocking temperature of MgO-Barrier-MTjs']js with L12-Ordered Mn3lr
[J].
Komagaki, Koujiro
;
Yamada, Kouji
;
Noma, Kenji
;
Kanai, Hitoshi
;
Kobayashi, Kazuo
;
Uehara, Yuji
;
Tsunoda, Masakiyo
;
Takahashi, Migaku
.
IEEE TRANSACTIONS ON MAGNETICS,
2007, 43 (08)
:3535-3537

Komagaki, Koujiro
论文数: 0 引用数: 0
h-index: 0
机构:
Fujitsu Ltd, Adv Head Technol Dev Dept, Nagano 3818579, Japan Fujitsu Ltd, Adv Head Technol Dev Dept, Nagano 3818579, Japan

Yamada, Kouji
论文数: 0 引用数: 0
h-index: 0
机构: Fujitsu Ltd, Adv Head Technol Dev Dept, Nagano 3818579, Japan

Noma, Kenji
论文数: 0 引用数: 0
h-index: 0
机构: Fujitsu Ltd, Adv Head Technol Dev Dept, Nagano 3818579, Japan

Kanai, Hitoshi
论文数: 0 引用数: 0
h-index: 0
机构: Fujitsu Ltd, Adv Head Technol Dev Dept, Nagano 3818579, Japan

Kobayashi, Kazuo
论文数: 0 引用数: 0
h-index: 0
机构: Fujitsu Ltd, Adv Head Technol Dev Dept, Nagano 3818579, Japan

Uehara, Yuji
论文数: 0 引用数: 0
h-index: 0
机构: Fujitsu Ltd, Adv Head Technol Dev Dept, Nagano 3818579, Japan

Tsunoda, Masakiyo
论文数: 0 引用数: 0
h-index: 0
机构: Fujitsu Ltd, Adv Head Technol Dev Dept, Nagano 3818579, Japan

Takahashi, Migaku
论文数: 0 引用数: 0
h-index: 0
机构: Fujitsu Ltd, Adv Head Technol Dev Dept, Nagano 3818579, Japan