Optical characterization of hydrogenated amorphous silicon carbide films from transmission spectra

被引：0
|
作者：
Hu, Zhihua [1 ,2 ]
Liao, Xianbo [1 ]
机构：
[1] Ctr. for Condensed Mat. Phys., Inst. of Semi-conduct., Chinese Acad. of Sci., Beijing 100083, China
[2] Inst. of Solar Energy, Yunnan Normal Univ., Kunming 650092, China
来源：
Pan Tao Ti Hsueh Pao/Chinese Journal of Semiconductors | 2005年 / 26卷 / 01期
关键词：
Hydrogenated amorphous silicon carbide films - Optical constants - PECVD - Transmission spectrum;
D O I：
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中图分类号：
学科分类号：
摘要：
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页码：34 / 37
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