Synthesis of vertically aligned carbon nanofibers using inductively coupled plasma-enhanced chemical vapor deposition

被引：0

作者：

Shoukat, Rizwan ^{[1
]}

Khan, Muhammad Imran ^{[2
,3
]}

机构：

[1] Department of Microsystems Engineering – IMTEK, University of Freiburg, Freiburg,79110, Germany

[2] Department of Electronics Engineering, University of Engineering and Technology (UET), Taxila,47050, Pakistan

[3] Micro/-Nano Electronic System Integration R&D Center (MESIC), University of Science and Technology of China (USTC), Hefei,Anhui,230027, China

来源：

Electrical Engineering | 2018年 / 100卷 / 02期

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摘要：

Nanocatalysts - Plasma enhanced chemical vapor deposition - Carbon nanofibers - Scanning electron microscopy - Plasma CVD - Substrates - Inductively coupled plasma

引用

页码：997 / 1002