Investigation of Al-doped ZnO channel layer in ZnO-based transparent thin-film transistors

被引：0
|
作者：
Department of Photonics, National Cheng Kung University, Tainan 701, Taiwan [1 ]
不详 [2 ]
机构：
[1] Lee, Hsin-Ying
[2] Shien, Wen-Ming
来源：
Lee, H.-Y. (hylee@ee.ncku.edu.tw) | 2012年 / Japan Society of Applied Physics卷 / 51期
关键词：
712.1 Semiconducting Materials - 714.2 Semiconductor Devices and Integrated Circuits - 804.2 Inorganic Compounds;
D O I：
026502
中图分类号：
学科分类号：
摘要：
22
引用
收藏
相关论文
共 50 条
  • [1] Investigation of Al-Doped ZnO Channel Layer in ZnO-Based Transparent Thin-Film Transistors
    Lee, Hsin-Ying
    Shien, Wen-Ming
    JAPANESE JOURNAL OF APPLIED PHYSICS, 2012, 51 (02)
  • [2] ZnO-based transparent thin-film transistors
    Hoffman, RL
    Norris, BJ
    Wager, JF
    APPLIED PHYSICS LETTERS, 2003, 82 (05) : 733 - 735
  • [3] Al-doped ZnO thin films deposited by confocal sputtering as electrodes in ZnO-based thin-film transistors
    Hernandez-Como, N.
    Morales-Acevedo, A.
    Aleman, M.
    Mejia, I.
    Quevedo-Lopez, M. A.
    MICROELECTRONIC ENGINEERING, 2016, 150 : 26 - 31
  • [4] Atomic Layer Deposition of Al-Doped ZnO Contacts for ZnO Thin-Film Transistors
    Rowlinson, Ben D.
    Zeng, Jiale
    Akrofi, Joshua D.
    Patzig, Christian
    Ebert, Martin
    Chong, Harold M. H.
    IEEE ELECTRON DEVICE LETTERS, 2024, 45 (05) : 837 - 840
  • [5] Fully Transparent Al-Doped ZnO Thin-Film Transistors on Flexible Plastic Substrates
    Wang, Wei
    Han, Dedong
    Cai, Jian
    Geng, Youfeng
    Wang, Liangliang
    Wang, Longyan
    Tian, Yu
    Zhang, Xing
    Wang, Yi
    Zhang, Shengdong
    JAPANESE JOURNAL OF APPLIED PHYSICS, 2013, 52 (04)
  • [6] Al-doped ZnO Thin-Film Transistors on Flexible Plastic Substrate
    Wang, Wei
    Han, Dedong
    Cai, Jian
    Geng, Youfeng
    Wang, Liangliang
    Ren, Yicheng
    Deng, Hao
    Wang, Yi
    Zhang, Shengdong
    2012 19TH INTERNATIONAL WORKSHOP ON ACTIVE-MATRIX FLATPANEL DISPLAYS AND DEVICES (AM-FPD): TFT TECHNOLOGIES AND FPD MATERIALS, 2012, : 175 - 178
  • [7] Highly Transparent and Conductive Al-Doped ZnO/Ag/Al-Doped ZnO Multilayer Source/Drain Electrodes for Transparent Oxide Thin Film Transistors
    Choi, Kwang-Hyuk
    Choi, Yoon-Young
    Jeong, Jin-A
    Kim, Han-Ki
    Jeon, S.
    ELECTROCHEMICAL AND SOLID STATE LETTERS, 2011, 14 (04) : H152 - H155
  • [8] Bi-layer Channel Structure-Based Oxide Thin-Film Transistors Consisting of ZnO and Al-Doped ZnO with Different Al Compositions and Stacking Sequences
    Cho, Sung Woon
    Yun, Myeong Gu
    Ahn, Cheol Hyoun
    Kim, So Hee
    Cho, Hyung Koun
    ELECTRONIC MATERIALS LETTERS, 2015, 11 (02) : 198 - 205
  • [9] Bi-layer channel structure-based oxide thin-film transistors consisting of ZnO and Al-doped ZnO with different Al compositions and stacking sequences
    Sung Woon Cho
    Myeong Gu Yun
    Cheol Hyoun Ahn
    So Hee Kim
    Hyung Koun Cho
    Electronic Materials Letters, 2015, 11 : 198 - 205
  • [10] Enhanced Performance in Al-Doped ZnO Based Transparent Flexible Transparent Thin-Film Transistors Due to Oxygen Vacancy in ZnO Film with Zn-Al-O Interfaces Fabricated by Atomic Layer Deposition
    Li, Yang
    Yao, Rui
    Wang, Huanhuan
    Wu, Xiaoming
    Wu, Jinzhu
    Wu, Xiaohong
    Qin, Wei
    ACS APPLIED MATERIALS & INTERFACES, 2017, 9 (13) : 11711 - 11720
12345