Atomically Controlled Fabrication Process as the Next Generation Ultra-Precision Machining Technology

被引:0
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作者
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来源
Seimitsu Kogaku Kaishi | 2013年 / 10卷 / 887-890期
关键词
Atmospheric pressure plasma enhanced chemical transport; Atomically controlled fabrication process; Functional materials; Hard-X-ray focusing; Neutron focusing; Ultra-precision machining;
D O I
10.2493/jjspe.79.887
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摘要
[No abstract available]
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页码:887 / 890
页数:3
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