Preparation of Mn-Co-Ni-O films by RF magnetron sputtering for IR thermal detectors

被引：0
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作者：
Ouyang, Cheng [1 ]
Wu, Jing [1 ]
Zhou, Wei [1 ]
Gao, Yanqing [1 ]
Hou, Yun [1 ]
Huang, Zhiming [1 ]
机构：
[1] National Laboratory for Infrared Physics, Shanghai Institute of Technical Physics, CAS, Shanghai 200083, China
来源：
Hongwai yu Jiguang Gongcheng/Infrared and Laser Engineering | 2014年 / 43卷 / 04期
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页码：1068 / 1072
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