Smooth layer for reducing roughness of EUV/soft x-ray multilayer substrate
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作者:
Zhang, Li-Chao
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机构:State Key Lab. of Applied Optics, Changchun Institute of Optics and Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China
Zhang, Li-Chao
Jin, Chun-Shui
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h-index: 0
机构:State Key Lab. of Applied Optics, Changchun Institute of Optics and Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China
Jin, Chun-Shui
机构:
[1] State Key Lab. of Applied Optics, Changchun Institute of Optics and Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China
[2] Graduate School, Chinese Academy of Sciences, Beijing 100039, China