Experiments and structural optimization of micro-electro-mechanical system-based grating moving light modulator

被引:0
作者
Zhang, Jie [1 ]
Huang, Shanglian [1 ]
Zhang, Zhihai [1 ]
Sun, Jiyong [1 ]
Shi, Lingna [1 ]
Zhu, Yong [1 ]
机构
[1] Key Laboratory of Optoelectronic Technology and Systems, Chongqing University, Chongqing 400030, China
来源
Guangxue Xuebao/Acta Optica Sinica | 2007年 / 27卷 / 09期
关键词
D O I
暂无
中图分类号
学科分类号
摘要
引用
收藏
页码:1565 / 1569
相关论文
共 50 条
[41]   A micro-electro-mechanical accelerometer based on gallium nitride on silicon [J].
Morelle, C. ;
Theron, D. ;
Roch-Jeune, I. ;
Tilmant, P. ;
Okada, E. ;
Vaurette, F. ;
Grimbert, B. ;
Derluyn, J. ;
Degroote, S. ;
Germain, M. ;
Faucher, M. .
APPLIED PHYSICS LETTERS, 2023, 122 (03)
[42]   Calibration of a micro-electro mechanical system-based accelerometer for vehicle navigation [J].
Ghaffari, A. ;
Khodayari, A. ;
Nosoudi, S. ;
Arefnezhad, S. .
PROCEEDINGS OF THE INSTITUTION OF MECHANICAL ENGINEERS PART C-JOURNAL OF MECHANICAL ENGINEERING SCIENCE, 2019, 233 (02) :554-560
[43]   paper Dynamics of periodic solution to a electrostatic Micro-Electro-Mechanical system [J].
Yuan, Qigang ;
Cheng, Zhibo ;
Li, Xueping .
COMMUNICATIONS IN NONLINEAR SCIENCE AND NUMERICAL SIMULATION, 2023, 116
[44]   Quantum control spectroscopy (QCS) with a micro-electro-mechanical system (MEMS) [J].
Buckup, T. ;
Moehring, J. ;
Motzkus, M. .
MEMS ADAPTIVE OPTICS III, 2009, 7209
[45]   Fatigue of LIGA Ni Micro-Electro-Mechanical System Thin Films [J].
Y. Yang ;
S. Allameh ;
J. Lou ;
B. Imasogie ;
B.L. Boyce ;
W.O. Soboyejo .
Metallurgical and Materials Transactions A, 2007, 38 :2340-2348
[46]   A Novel Approach for Micro-electro-mechanical System(MEMS) Vacuum Packaging [J].
WANG Chenggang GAN Zhiyin WANG Xuefang LIN Dong LIU Sheng ZHANG Honghai Institute of MicroSystems Huazhong University of Science and Technology Wuhan PRChina .
InternationalJournalofPlantEngineeringandManagement, 2008, (03) :148-153
[47]   Modeling and simulation for electrostatically driven micro-electro-mechanical (MEMS) system [J].
Ha, T ;
Kwon, O ;
Kim, J ;
Oh, J ;
Won, T .
JOURNAL OF THE KOREAN PHYSICAL SOCIETY, 2003, 42 :S676-S680
[48]   Chaos and Nonlinear Feedback Control of the Arch Micro-Electro-Mechanical System [J].
LUO Shaohua ;
LI Shaobo ;
TAJADDODIANFAR Farid .
Journal of Systems Science & Complexity, 2018, 31 (06) :1510-1524
[49]   Bending properties of a flexible micro-electro-mechanical system array antenna [J].
Cong, Lin ;
Xu, Lixin ;
Han, Qi ;
Dong, Tao .
9TH INTERNATIONAL CONFERENCE ON MICROWAVE AND MILLIMETER WAVE TECHNOLOGY (ICMMT 2016) PROCEEDINGS, VOL 2, 2016, :722-724
[50]   Asymptotic properties of quenching for the quasilinear electrostatic micro-electro-mechanical system [J].
Zhu, Liping ;
He, Shujuan .
MODERN PHYSICS LETTERS B, 2021, 35 (16)