Experiments and structural optimization of micro-electro-mechanical system-based grating moving light modulator

被引：0

作者：

Zhang, Jie ^{[1
]}

Huang, Shanglian ^{[1
]}

Zhang, Zhihai ^{[1
]}

Sun, Jiyong ^{[1
]}

Shi, Lingna ^{[1
]}

Zhu, Yong ^{[1
]}

机构：

[1] Key Laboratory of Optoelectronic Technology and Systems, Chongqing University, Chongqing 400030, China

来源：

Guangxue Xuebao/Acta Optica Sinica | 2007年 / 27卷 / 09期

关键词：

D O I：

暂无

中图分类号：

学科分类号：

摘要：

引用

页码：1565 / 1569

共 50 条

[31] Packaging technology of micro-electro-mechanical system by vacuum welding [J].

Guan, Rongfeng .

Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology, 2008, 28 (03) :275-279

[32] Photoacoustic Imaging by Use of Micro-Electro-Mechanical System Scanner [J].

Chen S.-L. .

Journal of Shanghai Jiaotong University (Science), 2018, 23 (1) :1-10

[33] Analysis of air damping force in micro-electro-mechanical system [J].

School of Aerospace Science and Engineering, Beijing Institute of Technology, Beijing 100081, China .

Dongbei Daxue Xuebao, 2008, SUPPL. (4-6) :4-6

[34] Bounded-but-unknown uncertainty optimization of micro-electro-mechanical systems [J].

Gurav, SP ;

Langelaar, M ;

Goosen, JFL ;

van Keulen, F .

COMPUTATIONAL FLUID AND SOLID MECHANICS 2003, VOLS 1 AND 2, PROCEEDINGS, 2003, :2291-2293

[35] A Micro-Electro-Mechanical System-Based Bulk Acoustic Wave Piezoelectric Disk Resonator for Detecting z-axis Rotation Rate [J].

许仲兴 ;

张卫平 ;

唐健 ;

张弓 ;

成宇翔 ;

陈文元 ;

关冉 .

JournalofShanghaiJiaotongUniversity(Science), 2015, 20 (03) :286-292

[36] A Micro-Electro-Mechanical System-based bulk acoustic wave piezoelectric disk resonator for detecting z-axis rotation rate [J].

Xu Z.-X. ;

Zhang W.-P. ;

Tang J. ;

Zhang G. ;

Cheng Y.-X. ;

Chen W.-Y. ;

Guan R. .

J. Shanghai Jiaotong Univ. Sci., 3 (286-292) :286-292

[37] Micro-Electro-Mechanical System (MEMS)-Based Piezoelectric Energy Harvester for Ambient Vibrations [J].

Saadon, Salem ;

Sidek, Othman .

WORLD CONFERENCE ON TECHNOLOGY, INNOVATION AND ENTREPRENEURSHIP, 2015, :2353-2362

[38] Virtual Reality-based Rapid Prototyping design for Micro-Electro-Mechanical System [J].

Zhao, X ;

Lu, B ;

Lu, GZ ;

Huang, YL .

1997 IEEE INTERNATIONAL CONFERENCE ON INTELLIGENT PROCESSING SYSTEMS, VOLS 1 & 2, 1997, :1765-1768

[39] Calibration of a micro-electro mechanical system-based accelerometer for vehicle navigation [J].

Ghaffari, A. ;

Khodayari, A. ;

Nosoudi, S. ;

Arefnezhad, S. .

PROCEEDINGS OF THE INSTITUTION OF MECHANICAL ENGINEERS PART C-JOURNAL OF MECHANICAL ENGINEERING SCIENCE, 2019, 233 (02) :554-560

[40] A micro-electro-mechanical accelerometer based on gallium nitride on silicon [J].

Morelle, C. ;

Theron, D. ;

Roch-Jeune, I. ;

Tilmant, P. ;

Okada, E. ;

Vaurette, F. ;

Grimbert, B. ;

Derluyn, J. ;

Degroote, S. ;

Germain, M. ;

Faucher, M. .

APPLIED PHYSICS LETTERS, 2023, 122 (03)

← 1 2 3 4 5 →