Advances in MEMS Gas Sensors Based on Metal-oxide Semiconductor Materials

被引：0
|
作者：
Yin J. [1 ,2 ]
Shen W. [2 ,3 ]
Lyu D. [2 ,3 ]
Zhao J. [2 ,4 ]
Hu P. [1 ]
Song W. [2 ,3 ]
机构：
[1] School of Materials Science and Engineering, Shanghai University, Shanghai
[2] Ningbo Institute of Material Technology & Engineering, Chinese Academy of Sciences, Zhejiang, Ningbo
[3] Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing
[4] Faculty of Materials Metallurgy and Chemistry, Jiangxi University of Science and Technology, Jiangxi, Ganzhou
来源：
Cailiao Daobao/Materials Reports | 2024年 / 38卷 / 01期
关键词：
gas sensors; intelligent sensing system; metal-oxide semiconductor; micro-electro-mechanical system; sensor array;
D O I：
10.11896/cldb.22070075
中图分类号：
学科分类号：
摘要：
With the rapid development of the Internet of things,there is an increasing demand for monitoring volatile organic chemicals in various fields. Metal-oxide semiconductor (MOS)gas sensors based onadvanced micro-electro-mechanical systems (MEMS)technology have significantly developed in the past few decades. The diverse design of micro hot plates,the diversification of MOS nanostructures,and the emergence of machine learning algorithms have promoted the sensing performance of MEMS sensors and their intelligent sensing systems. This paper will summarize the latest advances in the classification,preparation,and application of MEMS gas sensors and the sensor array. Finally,the development prospect of MEMS-based gas sensors is summarized. © 2024 Cailiao Daobaoshe/ Materials Review. All rights reserved.
引用
收藏
相关论文
共 84 条
  • [11] Ma J H, Ren Y, Zhou X R, Et al., Advanced Functional Materials, 28, 6, (2018)
  • [12] Zhang W Y, Yue H, Liu J J, Et al., Transducer and Microsystem Technologies, 41, 5, (2022)
  • [13] Lekshmi M S, Pamula R, Kartik A, Et al., ConferenceRecord of 2018 7th IEEE International Symposium on Next-Generation Electronics (ISNE)-Next-GenerationElectronicsfor AI and 5G Communications, (2018)
  • [14] Yuan Z Y, Yang F, Meng F L, Et al., IEEE Sensors Journal, 21, 17, (2021)
  • [15] Liu H T, Zhang L, Li K H H, Et al., Micromachines, 9, 11, (2018)
  • [16] Davydova M, Kromka A, Rezek B, Et al., Applied Surface Science, 256, 18, (2010)
  • [17] Moon B U, Lee J M, Shim C H, Et al., Sensors and Actuators B-Chemical, 108, 1-2, (2005)
  • [18] He B, Yang Y, Yuen M F, Et al., Nano Today, 8, 3, (2013)
  • [19] Nazemi H, Joseph A, Park J, Et al., Sensors, 19, 6, (2019)
  • [20] Guan D B, Yang F, Liu Q, Et al., Conference Record of 2016 15th IEEE Sensors Conference, (2016)
123456789