MEMS based electro-conjugate fluid micropump

被引：0

作者：

Wang, Haibo ^{[1
]}

Zhang, Ruzhao ^{[1
]}

Zou, Hailong ^{[1
]}

Kim, Joon W. ^{[2
]}

机构：

[1] School of Mechanical Engineering, Southwest Jiaotong University, Chengdu

[2] Precision and Intelligence Laboratory, Tokyo Institute of Technology, Yokohama

来源：

Qiangjiguang Yu Lizishu/High Power Laser and Particle Beams | 2015年 / 27卷 / 02期

基金：

中国国家自然科学基金;

关键词：

Electro-conjugate fluid; MEMS; Micropump; Triangular prism slit electrode pair;

D O I：

10.11884/HPLPB201527.024128

中图分类号：

学科分类号：

摘要：

In order to overcome the deficiency in the fabrication of triangular prism slit (TPS) electrode pairs with ultrathick and high aspect ratio, to obtain a jet generator with good appearance and in that way improve the output performance of electro-conjugate fluid (ECF) micropump, several optimization measures for the fabrication of TPS electrode pairs based on MEMS technology are proposed. By repeating experiment and improvement based on theoretical analysis, structural optimization of slit electrode, optimized process parameter for spin coating, heat treatment, development and a novel removal method for KMPR negative photoresists are utilized. Finally, the jet generator with thickness of almost 500 μm and high aspect ratio of TPS electrode pairs are fabricated successfully. The tip of triangular prism electrode has unbroken structure and the slit electrode attaches to the conductor layer well. Moreover, a prototype of ECF micropump is designed and assembled for next experimental study. ©, 2015, Editorial Office of High Power Laser and Particle Beams. All right reserved.

引用

页数：4

共 10 条

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