A new design of a piezoelectric triaxial micro-accelerometer

被引：5
作者：
Jianyan, Wang [1 ,2 ]
Tingting, Wang [1 ,2 ]
Hang, Guo [1 ,2 ]
机构：
[1] Department of Mechanical and Electrical Engineering, Xiamen University, Xiamen
[2] Pen-Tung Sah Institue of Micro-Nano Science and Technology, Xiamen
来源：
Key Engineering Materials | 2015年 / 645卷
关键词：
Accelerometer; Circuit connection; Simulation; Theotetical analysis;
D O I：
10.4028/www.scientific.net/KEM.645-646.841
中图分类号：
学科分类号：
摘要：
Accelerometer in MEMS always is made by capacitive or piezoresistive, whose dynamic response is not good, the operating frequency is narrow, and the cross-axis sensitivity is low. A new type of piezoelectric micro-accelerometer is designed, and its structure is “xâ type. The sensing unit is piezoelectric PZT films, which is achieved by sol-gel method. The accelerometer is a triaxial accelerometer. The theoretical and simulation analysis is used to achieve the charge sensitivity and response frequency, and also get the optimal structural parameters. A new circuit connection is proposed to improve the sensitivity and avoid the cross-axis sensitivity. The design achieves the z-axis sensitivity with more than 40 pC/g, x, y-axis sensitivity with more than 8pC/g, and the response frequency is about 3000Hz. © (2015) Trans Tech Publications, Switzerland.
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页码：841 / 846
页数：5
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