Correlation of electrical, thermal and structural properties of microcrystalline silicon thin films

被引：0
|
作者：
Das, Debajyoti [1 ,3 ]
Jana, Madhusudan [2 ]
Barua, Ashok K. [1 ]
Chattopadhyay, Surajit [2 ]
Chen, Li Chyong [1 ]
Chen, Kuei Hsien [2 ]
机构：
[1] Energy Research Unit, Indian Association for the Cultivation of Science, Jadavpur, Kolkata 700 032, India
[2] Institute of Atomic and Molecular Sciences, Academia Sinica, Taipei 106, Taiwan
[3] Centre for Condensed Matter Sciences, National Taiwan University, Taipei 106, Taiwan
来源：
Japanese Journal of Applied Physics, Part 2: Letters | 2002年 / 41卷 / 3 A期
关键词：
D O I：
10.1143/jjap.41.l229
中图分类号：
学科分类号：
摘要：
24
引用
收藏
相关论文
共 50 条
  • [1] Correlation of electrical, thermal and structural properties of microcrystalline silicon thin films
    Das, D
    Jana, M
    Barua, AK
    Chattopadhyay, S
    Chen, LC
    Chen, KH
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 2002, 41 (3A): : L229 - L232
  • [2] Correlation between electrical-optical and structural properties of microcrystalline silicon N type films
    Martins, R
    Macarico, A
    Ferreira, I
    Nunes, R
    Bicho, A
    Fortunato, E
    AMORPHOUS SILICON TECHNOLOGY - 1996, 1996, 420 : 807 - 812
  • [3] Structural and electrical characterization of b-doped microcrystalline silicon thin films
    Saleh, R
    Nickel, NH
    AMORPHOUS AND HETEROGENEOUS SILICON-BASED FILMS-2002, 2002, 715 : 327 - 332
  • [4] In situ correlation between the optical and electrical properties of thin intrinsic and n-type microcrystalline silicon films
    Hamma, S
    Cabarrocas, PRI
    JOURNAL OF APPLIED PHYSICS, 1997, 81 (11) : 7282 - 7288
  • [5] Growth and properties of microcrystalline silicon thin films
    Zhang, X. (xdzhang@nankai.edu.cn), 2005, Science Press (25):
  • [6] Structural studies and influence of the structure on the electrical and optical properties of microcrystalline silicon thin films produced by RF sputtering
    Cerqueira, MF
    Ferreira, JA
    Adriaenssens, GJ
    THIN SOLID FILMS, 2000, 370 (1-2) : 128 - 136
  • [7] Correlation of structural and electrical transport properties in hydrogenated silicon films
    Barreca, F
    Fazio, E
    Neri, F
    Trusso, S
    Vasi, C
    NUCLEAR AND CONDENSED MATTER PHYSICS, 2000, 513 : 23 - 26
  • [8] Electrical and Structural Properties of Crystallized Amorphous Silicon Thin Films
    Shariah, Adnan
    Bataineh, Ma'in
    SILICON, 2023, 15 (06) : 2727 - 2735
  • [9] Electrical and Structural Properties of Crystallized Amorphous Silicon Thin Films
    Adnan Shariah
    Ma’in Bataineh
    Silicon, 2023, 15 : 2727 - 2735
  • [10] Electrical transport properties of microcrystalline silicon thin films prepared by Cat-CVD
    Liu, F
    Zhu, M
    Feng, Y
    Han, Y
    Liu, J
    THIN SOLID FILMS, 2001, 395 (1-2) : 97 - 100
12345