Experimental study regarding the surface roughness of circular crystal wafers sliced by a multi-wire saw with reciprocating and rocking functions

被引：0

作者：

Lin, Zhishu ^{[1
,3
]}

Huang, Hui ^{[2
]}

Li, Shengbo ^{[1
,3
]}

机构：

[1] School of Mechanical and Automotive Engineering, Fujian Province, Xiamen University of Technology, Xiamen,361024, China

[2] Institute of Manufacturing Engineering, Fujian Province, Huaqiao University, Xiamen,361021, China

[3] Fujian Province Key Laboratory of Green Intelligent Cleaning Technology and Equipment, Xiamen,361024, China

来源：

International Journal of Advanced Manufacturing Technology | 1600年 / 135卷 / 3-4期

关键词：

Sapphire;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

引用

页码：1385 / 1396