Effect of hydrogen coverage on silicon thin film growth: molecular dynamics investigation

被引：0
|
作者：
Muramatsu, Shinya [1 ]
Shimada, Masatoshi [1 ]
Hirao, Masahiko [1 ]
机构：
[1] Univ of Tokyo, Tokyo, Japan
来源：
Materials Research Society Symposium - Proceedings | 2000年 / 584卷
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
8
引用
收藏
页码：251 / 256
相关论文
共 50 条
  • [41] THE ROLE OF HYDRIDE COVERAGE IN SURFACE-LIMITED THIN-FILM GROWTH OF EPITAXIAL SILICON AND GERMANIUM
    ERES, G
    SHARP, JW
    JOURNAL OF APPLIED PHYSICS, 1993, 74 (12) : 7241 - 7250
  • [42] Atomic-level investigation of Al and Ni thin film growth on Ni(111) surface: Molecular dynamics simulation
    Lee, Soon-Gun
    Chung, Yong-Chae
    APPLIED SURFACE SCIENCE, 2007, 253 (22) : 8896 - 8900
  • [43] Molecular Dynamics simulation of Ni thin film growth on Cu (001) substrate
    Li, Y. J.
    Mo, Y. J.
    Huang, J. N.
    Jiang, S. J.
    ADVANCES IN ENGINEERING MATERIALS AND APPLIED MECHANICS, 2016, : 547 - 554
  • [44] Molecular dynamics studies of thin film growth by ionized cluster beam deposition
    Yorizane, K
    Yamamura, Y
    COMPUTATIONAL MATERIALS SCIENCE, 1999, 14 (1-4) : 241 - 247
  • [45] Molecular Dynamics Simulation of Deposition and Growth of Cu Thin Film on Si Substrate
    Zhang, Jun
    Liu, Chong
    Shu, Yonghua
    Fan, Jing
    28TH INTERNATIONAL SYMPOSIUM ON RAREFIED GAS DYNAMICS 2012, VOLS. 1 AND 2, 2012, 1501 : 919 - 925
  • [46] Molecular dynamics simulation of thin film growth on giant magnetoresistance corrugated structures
    Weng, CI
    Hwang, CC
    Chang, CL
    Chang, JG
    Ju, SP
    PHYSICAL REVIEW B, 2002, 65 (19) : 1 - 11
  • [47] Molecular dynamics simulation of copper thin film growth on β-ta (002) substrate
    Li, YH
    Adams, JB
    MAGNETIC AND ELECTRONIC FILMS-MICROSTRUCTURE, TEXTURE AND APPLICATION TO DATA STORAGE, 2002, 721 : 79 - 83
  • [48] Molecular Dynamics simulations of Cu/Ta and Ta/Cu thin film growth
    Klaver, TPC
    Thijsse, BJ
    JOURNAL OF COMPUTER-AIDED MATERIALS DESIGN, 2003, 10 (02): : 61 - 74
  • [49] HYDROGEN DETECTION AT THIN-FILM SILICON INTERFACES
    JAWOROWSKI, AE
    SURFACE AND INTERFACE ANALYSIS, 1989, 14 (1-2) : 27 - 30
  • [50] Scale Effect of Nano-indentation of Silicon - A Molecular Dynamics Investigation
    Mylvaganam, Kausala
    Zhang, L. C.
    ADVANCES IN ABRASIVE TECHNOLOGY XI, 2009, 389-390 : 521 - 526
12345