Effect of hydrogen coverage on silicon thin film growth: molecular dynamics investigation

被引：0
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作者：
Muramatsu, Shinya [1 ]
Shimada, Masatoshi [1 ]
Hirao, Masahiko [1 ]
机构：
[1] Univ of Tokyo, Tokyo, Japan
来源：
Materials Research Society Symposium - Proceedings | 2000年 / 584卷
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8
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页码：251 / 256
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