Single-ion micromechanics

被引：0

作者：

Fischer, B.E.

Metzger, S.

机构：

来源：

| 2000年 / Materials Research Society, Warrendale, PA, United States卷 / 25期

关键词：

Crystal lattices - Crystal microstructure - Electron irradiation - Heavy ions - High energy physics - Ion bombardment - Lithography - Photons - Semiconducting germanium - Transmission electron microscopy - Uranium - X rays;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

An account is given on the production of different types of microstructures using high-energy heavy-ion beams, a process called single-ion micromechanics. The formation of high-resolution 'radiation shadows' using unfocused, high-energy heavy ions is described. Further, the production of microstructures using precisely aimed single ions and the technology underlying this process using a microprobe are discussed.

引用