Robust and inexpensive six-axis force-torque sensors using MEMS barometers

被引：38

作者：

Guggenheim J.W. ^{[1
]}

Jentoft L.P. ^{[2
]}

Tenzer Y. ^{[2
]}

Howe R.D. ^{[2
]}

机构：

[1] Massachusetts Institute of Technology, Cambridge, MA

[2] Harvard School of Engineering and Applied Science, Harvard University, Cambridge, MA

来源：

IEEE/ASME Transactions on Mechatronics | 2017年 / 22卷 / 02期

基金：

美国国家科学基金会;

关键词：

Force measurement; microelectromechanical systems; robot sensing systems; torque measurement;

D O I：

10.1109/TMECH.2017.2654446

中图分类号：

学科分类号：

摘要：

Current commercial force-torque sensors are sensitive and accurate, but are also typically expensive and fragile. These features limit their use in cost-sensitive applications and unstructured environments such as people's homes. This paper presents a new design for an inexpensive and robust force-torque sensor that uses microelectromechanical system barometer transducers. The new design results in a six-axis force-torque sensor with an R2 greater than 0.90 for Fx and F y and an R2greater than 0.98 for F z, M x, M y, and M zduring compound loading. Furthermore, this sensor can be assembled in two days with off-the-shelf components for less than 20 USD. © 1996-2012 IEEE.

引用

页码：838 / 844

页数：6

共 16 条

[1]

Pandya H.J., Kim H.T., Roy R., Desai J.P., MEMS based low cost piezoresistive microcantilever force sensor and sensor module, Mater. Sci. Semicond. Process, 19, pp. 163-173, (2014)

[2]

Kang C., Performance improvement of a 6-axis force-torque sensor via novel electronics and cross-shaped double-hole structure, Int. J. Control Autom. Syst, 3, 3, pp. 469-476, (2005)

[3]

Li Y.-J., Zhang J., Jia Z.-Y., Qian M., Li H., Research on forcesensing elements spatial arrangement of piezoelectric six-component force/torque sensor, Mech. Syst. Signal Process, 23, 8, pp. 2687-2698, (2009)

[4]

Fernandez A.F., Et al., Multi-component force sensor based on multiplexed fibre Bragg grating strain sensors, Meas. Sci. Technol, 12, 7, pp. 810-813, (2001)

[5]

Park Y.-L., Ryu S.C., Black R., Chau K., Moslehi B., Cutkosky M., Exoskeletal force-sensing end-effectors with embedded optical fiber-Bragg-grating sensors, IEEE Robot, 25, 6, pp. 1319-1331, (2009)

[6]

Beyeler F., Muntwyler S., Nelson B.J., Design and calibration of a microfabricated 6-axis force-torque sensor formicrorobotic applications, Proc. IEEE Int. Conf. Robot. Autom., pp. 520-525, (2009)

[7]

Beyeler F., Muntwyler S., Nelson B.J., A six-axis MEMS force-torque sensor with micro-Newton and nano-Newtonmeter resolution, J. Microelectromech. Syst, 18, 2, pp. 433-441, (2009)

[8]

Berkelman P., Whitcomb L., Taylor R., Jensen P., A miniature microsurgical instrument tip force sensor for enhanced force feedback during robot-assisted manipulation, IEEE Trans. Robot. Autom, 19, 5, pp. 917-921, (2003)

[9]

Rikkers J., Design of A Miniature Low-budget Torque Sensor, (2008)

[10]

Hirzinger G., Bals J., Otter M., Stelter J., The DLR-KUKA success story: Robotics research improves industrial robots, IEEE Robot. Autom. Mag, 12, 3, pp. 16-23, (2005)

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