Study on noise suppression technology for high-speed deflection subsystem

被引：0
|
作者：
Yao, Zuo-Bin [1 ]
Zhang, Yu-Lin [1 ]
Wei, Shou-Shui [1 ]
机构：
[1] Institute of Electronbeam, Shandong University, Jinan 250061, China
来源：
Weixi Jiagong Jishu/Microfabrication Technology | 2008年 / 02期
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页码：5 / 7
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