Optimization of sensing electrode distribution parameters of quartz MEMS gyroscope

被引：0

作者：

Li, Xuefeng ^{[1
,3
]}

Gan, Luo ^{[1
]}

Zhou, Qi ^{[2
]}

机构：

[1] College of Electronic and Information Engineering, Tongji University, Shanghai,201804, China

[2] Educational Technology and Computing Center, Tongji University, Shanghai,200092, China

[3] Shanghai Research Institute for Intelligent Autonomous Systems, Tongji University, Shanghai,201210, China

来源：

Zhongguo Guanxing Jishu Xuebao/Journal of Chinese Inertial Technology | 2024年 / 32卷 / 06期

关键词：

Electrodes - Electromechanical coupling - Gyroscopes - Quartz - Shear stress;

D O I：

10.13695/j.cnki.12-1222/o3.2024.06.009

中图分类号：

学科分类号：

摘要：

引用

页码：592 / 597