Interface engineering to decrease interdif fusion and improve thermal stability of EUV multilayer

被引：0
|
作者：
Yu, Bo [1 ]
Kuang, Shangqi [1 ]
Li, Chun [1 ]
Jin, Chunshui [1 ]
机构：
[1] Yu, Bo
[2] Kuang, Shangqi
[3] Li, Chun
[4] Jin, Chunshui
来源：
Yu, B. (yubodisan@126.com) | 1600年 / Science Press卷 / 11期
关键词：
Multilayers;
D O I：
10.3788/COL201311.S10604
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学科分类号：
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