Design and measurement of a miniaturized three dimensional electric field sensor

被引:0
|
作者
Zhang, Xing [1 ,2 ]
Bai, Qiang [1 ]
Xia, Shan-Hong [1 ]
Zheng, Feng-Jie [1 ,2 ]
Chen, Shao-Feng [1 ]
机构
[1] State Key Lab. of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100080, China
[2] Graduate School, Chinese Academy of Sciences, Beijing 100039, China
关键词
Electric field measurement - Electric fields - One dimensional - Three dimensional - Two dimensional;
D O I
暂无
中图分类号
学科分类号
摘要
Electric field sensors used at present are only capable of measuring one or two dimensional values of electric field intensity. A miniaturized electric field sensor used for measuring three dimensional electric field is introduced, which is composed of axial (Z) and radial (X, Y) electric field measuring units, driving unit and circuit unit. The practicability of the three dimensional electric field sensor is demonstrated, and it is shown that the theoretical prediction and experimental result are in good agreement.
引用
收藏
页码:1002 / 1004
相关论文
共 50 条
  • [31] Light field three-dimensional measurement
    Cai, Zewei
    Liu, Xiaoli
    Liao, Meihua
    He, Wenqi
    Pedrini, Giancarlo
    Osten, Wolfgang
    Peng, Xiang
    OPTICAL MEASUREMENT SYSTEMS FOR INDUSTRIAL INSPECTION XI, 2019, 11056
  • [32] A three dimensional measurement system with micro tactile sensor
    Cao, S
    Hässler-Grohne, W
    Brand, U
    Gao, S
    Wilke, R
    Büttgenbach, S
    OPTOMECHATRONIC SYSTEMS III, 2002, 4902 : 52 - 59
  • [33] Design of a Three Dimensional Magnetic Field Measurement System for TMS Pre-Testing
    Xiong, Hui
    Zhu, Jianguo
    Shi, Jinhua
    Meng, Shuai
    Luo, Xiaohui
    2017 20TH INTERNATIONAL CONFERENCE ON ELECTRICAL MACHINES AND SYSTEMS (ICEMS), 2017,
  • [34] Measurement of electric field distribution along composite insulators by integrated optical electric field sensor
    Zeng, Rong
    Zhang, Yun
    Chen, Weiyuan
    Zhang, Bo
    IEEE TRANSACTIONS ON DIELECTRICS AND ELECTRICAL INSULATION, 2008, 15 (01) : 302 - 310
  • [35] An ultrahigh sensitivity three-dimensional electric-field sensor with barium titanate crystal waveguides
    Luo, Mengxi
    Sun, DeGui
    Jin, Guangyong
    AIP ADVANCES, 2022, 12 (05)
  • [36] Research on the anti-charge-interference method for MEMS three-dimensional electric field sensor
    Zhang W.
    Zhang Z.
    Peng C.
    Xia S.
    Yi Qi Yi Biao Xue Bao/Chinese Journal of Scientific Instrument, 2023, 44 (08): : 239 - 248
  • [37] Whisker sensor design for three dimensional position measurement in robotic assisted beating heart surgery
    Bebek, Ozkan
    Cavusoglu, M. Cenk
    PROCEEDINGS OF THE 2007 IEEE INTERNATIONAL CONFERENCE ON ROBOTICS AND AUTOMATION, VOLS 1-10, 2007, : 225 - 231
  • [38] Design, Fabrication and Characterization of a MEMS-Based Three-Dimensional Electric Field Sensor with Low Cross-Axis Coupling Interference
    Ling, Biyun
    Peng, Chunrong
    Ren, Ren
    Chu, Zhaozhi
    Zhang, Zhouwei
    Lei, Hucheng
    Xia, Shanhong
    SENSORS, 2018, 18 (03):
  • [39] Design, Fabrication and Characterization of a Single-chip Three-dimensional Electric Field Microsensor
    Ling, Biyun
    Wang, Yu
    Peng, Chunrong
    Li, Bing
    Chu, Zhaozhi
    Li, Bin
    Xia, Shanhong
    2017 IEEE 12TH INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS (NEMS), 2017, : 307 - 310
  • [40] Design and optimization of an optical high electric field sensor
    Barthod, C
    Passard, M
    Fortin, M
    Galez, C
    Bouillot, J
    2000 CONFERENCE ON PRECISION ELECTROMAGNETIC MEASUREMENTS DIGEST, 2000, : 423 - 424