Design and measurement of a miniaturized three dimensional electric field sensor

Electric field sensors used at present are only capable of measuring one or two dimensional values of electric field intensity. A miniaturized electric field sensor used for measuring three dimensional electric field is introduced, which is composed of axial (Z) and radial (X, Y) electric field measuring units, driving unit and circuit unit. The practicability of the three dimensional electric field sensor is demonstrated, and it is shown that the theoretical prediction and experimental result are in good agreement.