Analysis of Measurement Uncertainty in THz-TDS Carried by Thickness Error

被引：0
作者：
Dong H.-L. [1 ]
Wang J.-C. [1 ]
Liu R.-H. [1 ]
Ma D.-X. [1 ]
Zhao D.-P. [1 ]
机构：
[1] State Key Laboratory of Pulsed Power Laser Technology, College of Electronic Engineering, National University of Defence Technology, Hefei
来源：
Faguang Xuebao/Chinese Journal of Luminescence | 2019年 / 40卷 / 03期
关键词：
Monocrystalline silicon; Optical constants; Terahertz time domain system(THz-TDS); Thickness error; Uncertainty;
D O I：
10.3788/fgxb20194003.0382
中图分类号：
学科分类号：
摘要：
The method and theory of extracting the sample optical constants with terahertz time domain system(THz-TDS) based on Fresnel formulas were demonstrated, the effect on the uncertainty of THz-TDS due to the thickness error was analyzed, and the uncertainty model was established. The measurement experiment of THz-TDS was designed, the refractive index of silicon wafer in terahertz band was extracted and the effect of error on extracting refractive index of sample was computed. Experimental results indicate that the measurement deviation increases with the thickness error increasing. For thicker samples, it has less effect on the measurement result carried by the same thickness error. The deviation of the refractive index measured by the system under 1 μm thickness error is 0.001 2 when the thickness of the sample is 994 μm, which is close to the simulation value of the model. Experimental results verify the availability of thickness error uncertainty model in measurement process, show the influence of thickness error on the measurement result, and have certain guiding significance on measure process and result analysis. © 2019, Science Press. All right reserved.
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页码：382 / 388
页数：6
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