Error analysis and processing of partial compensatory aspheric testing system

被引：8
|
作者：
State Key Laboratory of Modern Optical Instrumentation, Zhejiang University, Hangzhou 310027, China [1 ]
机构：
[1] State Key Laboratory of Modern Optical Instrumentation, Zhejiang University
来源：
Zhejiang Daxue Xuebao (Gongxue Ban) | 2012年 / 4卷 / 636-642+733期
关键词：
Aspheric testing; Error analysis; Error storage; Partial compensatory method;
D O I：
10.3785/j.issn.1008-973X.2012.04.010
中图分类号：
学科分类号：
摘要：
A partial compensatory aspheric testing system was proposed for general high-precision aspheric testing after extracting systematic error. System modeling was established with optimization, and the influence of surface figure and alignment precision on aspheric surface was analyzed in optical design software ZEMAX. By error analysis of aspheric testing system, the method of ray trace based on system modeling and error storage was employed to extract systematic error. Systematic error was categorized into two types, the error of testing path by ray trace in system modeling and the rest from the interferometer excluding testing path by the method of error storage. Computer simulation and experimental results show that aspheric surface is precisely reconstructed by revise iterative optimization reconstruction (ROR) after consideration of systematic error extracted by effective processing method. Comparison experiments showed that the reconstructed aspheric surface agreed well with the result of autocollimation method. The root mean square (RMS) value accuracy can reach 0.02λ (λ is wave).
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页码：636 / 642+733
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