Micro-watt order power generation by miniaturized energy harvester using coatable PVDF piezoelectric thin film

This paper describes the fabrication and characterization of a vibration energy harvester (VEH) using polyvinylidene fluoride (PVDF) film which is solution based piezoelectric polymer. The PVDF film with thickness of 30 μm was coated on phosphor bronze cantilever (thickness: 100 μm, length: 25 mm, width: 15 mm), and was polarized by applying electrical field. Then, Al thin film was deposited on the PVDF film as an upper electrode. When the fabricated VEH was vibrated by a vibration test system with the resonant frequency of 55 Hz and acceleration of 17 m/s2, maximum output power of 4.3 μW was obtained. © 2017 The Institute of Electrical Engineers of Japan.