Low-temperature synthesis of carbon nitride by microwave plasma CVD

被引：0
|
作者：
Tanaka, Ippei [1 ]
Sakamoto, Yukihiro [2 ]
机构：
[1] Graduate School, Chiba Institute of Technology, Narashino, Chiba,275-0016, Japan
[2] Chiba Institute of Technology, Narashino, Chiba,275-0016, Japan
来源：
Japanese Journal of Applied Physics | 2016年 / 55卷 / 01期
关键词：
Faceted particles - Low temperature synthesis - Microwave plasma CVD - Microwave power - Reaction gas - Substrate temperature;
D O I：
01AA15
中图分类号：
学科分类号：
摘要：
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