Low-temperature synthesis of carbon nitride by microwave plasma CVD

被引：0
|
作者：
Tanaka, Ippei [1 ]
Sakamoto, Yukihiro [2 ]
机构：
[1] Graduate School, Chiba Institute of Technology, Narashino, Chiba,275-0016, Japan
[2] Chiba Institute of Technology, Narashino, Chiba,275-0016, Japan
来源：
Japanese Journal of Applied Physics | 2016年 / 55卷 / 01期
关键词：
Faceted particles - Low temperature synthesis - Microwave plasma CVD - Microwave power - Reaction gas - Substrate temperature;
D O I：
01AA15
中图分类号：
学科分类号：
摘要：
引用
收藏
相关论文
共 50 条
  • [31] Low-Temperature Thermal CVD of Superblack Carbon Nanotube Coatings
    Basheer, Hameeda Jagalur
    Pachot, Charlotte
    Lafont, Ugo
    Devaux, Xavier
    Bahlawane, Naoufal
    ADVANCED MATERIALS INTERFACES, 2017, 4 (18):
  • [32] CVD BORON NITRIDE INFILTRATION OF FIBROUS STRUCTURES - PROPERTIES OF LOW-TEMPERATURE DEPOSITS
    GEBHARDT, JJ
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1973, 120 (08) : C248 - C248
  • [33] LOW-TEMPERATURE PHOTO-CVD SILICON-NITRIDE - PROPERTIES AND APPLICATIONS
    PETERS, JW
    GEBHART, FL
    HALL, TC
    SOLID STATE TECHNOLOGY, 1980, 23 (09) : 121 - 126
  • [34] LOW-TEMPERATURE SYNTHESIS OF DISPERSED CARBON
    NEKRASHEVICH, YB
    SMIRNOV, EP
    KOLTSOV, SI
    ALESKOVSKII, VB
    JOURNAL OF APPLIED CHEMISTRY OF THE USSR, 1978, 51 (02): : 457 - 458
  • [35] Synthesis of carbon nitride films at low temperature
    Hammer, P
    Baker, MA
    Lenardi, C
    Gissler, W
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1997, 15 (01): : 107 - 112
  • [36] Low-temperature catalytic synthesis gallium nitride nanowires
    Chang, KW
    Wu, JJ
    JOURNAL OF PHYSICAL CHEMISTRY B, 2002, 106 (32): : 7796 - 7799
  • [37] Mechanically Stimulated Low-Temperature Synthesis of Aluminium Nitride
    Abraamyan, A. S.
    Karagedov, G. R.
    CHEMISTRY FOR SUSTAINABLE DEVELOPMENT, 2014, 22 (01): : 11 - 15
  • [38] LOW-TEMPERATURE SYNTHESIS METHOD OF ALUMINUM NITRIDE POWDER
    Yun, Kyyoul
    Takahashi, Yuya
    Yanase, Shunji
    PROCESSING AND PROPERTIES OF ADVANCED CERAMICS AND COMPOSITES VII, 2015, 252 : 229 - 233
  • [39] Low-temperature solution synthesis of titanium nitride nanoparticles
    Kuehne, Alexander
    ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 2018, 255
  • [40] Mechanism of peptide modification by low-temperature microwave plasma
    Motrescu, Iuliana
    Ogino, Akihisa
    Tanaka, Shigeyasu
    Fujiwara, Taketomo
    Kodani, Shinya
    Kawagishi, Hirokazu
    Popa, Gheorghe
    Nagatsu, Masaaki
    SOFT MATTER, 2011, 7 (10) : 4845 - 4850
12345