Low-temperature synthesis of carbon nitride by microwave plasma CVD

被引：0
|
作者：
Tanaka, Ippei [1 ]
Sakamoto, Yukihiro [2 ]
机构：
[1] Graduate School, Chiba Institute of Technology, Narashino, Chiba,275-0016, Japan
[2] Chiba Institute of Technology, Narashino, Chiba,275-0016, Japan
来源：
Japanese Journal of Applied Physics | 2016年 / 55卷 / 01期
关键词：
Faceted particles - Low temperature synthesis - Microwave plasma CVD - Microwave power - Reaction gas - Substrate temperature;
D O I：
01AA15
中图分类号：
学科分类号：
摘要：
引用
收藏
相关论文
共 50 条
  • [11] Low-Temperature Synthesis of Solution Processable Carbon Nitride Polymers
    Li, Junyi
    Karjule, Neeta
    Qin, Jiani
    Wang, Ying
    Barrio, Jesus
    Shalom, Menny
    MOLECULES, 2021, 26 (06):
  • [12] LOW-TEMPERATURE SYNTHESIS OF DIAMOND FILMS USING MAGNETOMICROWAVE PLASMA CVD
    WEI, J
    KAWARADA, H
    SUZUKI, J
    HIRAKI, A
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1990, 29 (08): : L1483 - L1485
  • [13] LOW-TEMPERATURE DEPOSITION OF SILICON-OXIDE FILMS BY MICROWAVE PLASMA CVD OF TEOS
    RAY, SK
    MAITI, CK
    LAHIRI, SK
    CHAKRABORTI, NB
    SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 1990, 5 (04) : 361 - 363
  • [14] Low-Temperature Synthesis of Aluminum Nitride from Transition Alumina by Microwave Processing
    Chikami, Hideaki
    Fukushima, Jun
    Hayashi, Yamato
    Takizawa, Hirotsugu
    JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 2016, 99 (11) : 3540 - 3545
  • [15] Low-temperature synthesis of highly transparent carbon nitride thin films
    Xu, S
    Kumar, S
    Li, YA
    Jiang, N
    Lee, S
    JOURNAL OF PHYSICS-CONDENSED MATTER, 2000, 12 (06) : L121 - L126
  • [16] On the low-temperature synthesis of SWCNTs by thermal CVD
    Devaux, X.
    Vergnat, M.
    PHYSICA E-LOW-DIMENSIONAL SYSTEMS & NANOSTRUCTURES, 2008, 40 (07): : 2268 - 2271
  • [17] LOW-TEMPERATURE PLASMA-ENHANCED CVD SYNTHESIS OF PIEZOACTIVE ZNO FILMS
    TABENSKAYA, TV
    OVSYANNIKOV, VP
    MAZURENKO, EA
    JOURNAL DE PHYSIQUE IV, 1995, 5 (C5): : 711 - 715
  • [18] Low Temperature Growth of Carbon Nanotubes with Aligned Multiwalls by Microwave Plasma-CVD
    Roy, Ajay
    Das, Debajyoti
    61ST DAE-SOLID STATE PHYSICS SYMPOSIUM, 2017, 1832
  • [19] Generation of low-temperature plasma by low-pressure arcs for synthesis of nitride coatings
    Krysina, O. V.
    Koval, N. N.
    Lopatin, I. V.
    Shugurov, V. V.
    Kovalsky, S. S.
    VII CONFERENCE ON LOW TEMPERATURE PLASMA IN THE PROCESSES OF FUNCTIONAL COATING PREPARATION, 2016, 669
  • [20] SILICON EPITAXY AT LOW-TEMPERATURE BY PLASMA ENHANCED CVD
    PONS, M
    BOURGEAT, D
    TRILHE, J
    BOURDON, B
    VIDE-SCIENCE TECHNIQUE ET APPLICATIONS, 1980, 35 (200): : 3 - 12
12345