Research on phase-shifting characteristic of retarder array in simultaneous phase-shifting interferometer

被引：0

作者：

Zheng, Donghui ^{[1
]}

Chen, Lei ^{[1
]}

Li, Bo ^{[2
]}

Li, Jinpeng ^{[1
]}

Wulan, Tuya ^{[1
]}

机构：

[1] School of Electronic and Optical Engineering, Nanjing University of Science and Technology, Nanjing, 210094, Jiangsu

[2] Nanjing Institude of Astronomical Optics & Technology, National Astronomical Observatories, Chinese Academy of Sciences, Nanjing, 210042, Jiangsu

来源：

Guangxue Xuebao/Acta Optica Sinica | 2015年 / 35卷 / 04期

关键词：

Interferometry; Measurement; Optical measurement; Retarder array; Simultaneous phase-shifting;

D O I：

10.3788/AOS201535.0412004

中图分类号：

学科分类号：

摘要：

To study the phase-shifting characteristic of retarder array in simultaneous phase-shifting interferometry, the relationship between phase shift and fast-axis azimuth error is deduced through Jones vector and Jones matrix, and the error propagation formula is given. A spherical mirror is measured by simultaneous phaseshifting interferometer based on retarder array without calibrating fast-axis azimuth accurately and Zygo GPI XP interferometer, the difference of root-mean-square and peak-to-valley are 0.003λ and 0.033λ respectively. The influence of azimuth error tolerance and phase shift error of retarder array and optical axis azimuth error of polarizer is discussed. ©, 2015, Chinese Optical Society. All right reserved.

引用

页数：7

共 18 条

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