Observation of lattice undulation of commercial bonded silicon-on-insulator wafers by synchrotron X-ray topography

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作者：
Fukuda, Kazunori [1 ]
Yoshida, Takayoshi [1 ]
Shimura, Takayoshi [1 ]
Yasutake, Kiyoshi [1 ]
Umeno, Masataka [2 ]
机构：
[1] Dept. of Material and Life Science, Graduate School of Engineering, Osaka University, 2-1 Yamadaoka, Suita, Osaka 565-0871, Japan
[2] Department of Management Science, Faculty of Engineering, Fukui University of Technology, 3-6-1 Gakuen, Fukui 910-8585, Japan
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| 1600年 / Japan Society of Applied Physics卷 / 41期
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