Design of adjustable dispersive objective lens for chromatic confocal system

被引：4

作者：

Cui C.-C. ^{[1
]}

Li H. ^{[1
]}

Yu Q. ^{[2
,3
]}

Ye R.-F. ^{[2
]}

机构：

[1] Institute of Manufacturing Technology, Huaqiao University, Xiamen

[2] College of Mechanical Engineering and Automation, Huaqiao University, Xiamen

[3] Shanghai Key Laboratory of Modern Optical System, School of Optical-Electrical and Computer Engineering, University of Shanghai Science and Technology, Shanghai

来源：

Guangxue Jingmi Gongcheng/Optics and Precision Engineering | 2017年 / 25卷 / 04期

关键词：

Axial dispersion; Axial resolution; Chromatic confocal; Dispersive objective; Surface topography detection;

D O I：

10.3788/OPE.20172504.0875

中图分类号：

学科分类号：

摘要：

Aiming at the adjustment of measuring range and resolution in Chromatic Confocal Microscopy (CCM), a dispersive objective for chromatic confocal system was designed, which can realize chromatic dispersion and focusing function separately. The chromatic dispersion was achieved through a dispersion tube lens, which was composed of pure spherical refraction lens. The focusing function was accomplished by a commercial objective lens. The structure, material and aberrations of the dispersive tube lens were designed and optimized by ZEMAX software. The simulation shows that the axial linear chromatic dispersion is better than 230 mm in visible waveband. Moreover the axial linear dispersion range of the finished tube lens can be up to 160 mm. The dispersion characteristics of the tube lens combined with different focusing objective lenses were determined experimentally. The results show that the axial dispersion region with high linearity can be maintained in the case of different focusing objective lens. With commercial objective lens of 4x and 10x magnification, the measurement ranges of 1 300 μm and 225 μm are obtained with axial resolution of 2 μm and 0.4 μm respectively. Thus, the modulation of measurement range and resolution is achieved. © 2017, Science Press. All right reserved.

引用

页码：875 / 883

页数：8

共 21 条

[1]

Cui C.C., Yu Q., Zhang A., Et al., Measurement system of surface topography for diamond grinding wheel, Opt. Precision Eng., 22, 12, pp. 3167-3174, (2014)

[2]

Yu Q., Yu X.F., Cui C.C., Et al., Survey of parallel light source technology in parallel confocal measurement, Chinese Optics, 6, 5, pp. 652-659, (2013)

[3]

ISO 25178-602 Geometrical product specification (GPS)-surface texture: areal-part 602: Nominal characteristics of non-contact (confocal chromatic probe) instruments, (2010)

[4]

Molesini G., Pedrini G., Poggi P., Et al., Focus-wavelength encoded optical profilometer, Optics Communications, 49, 4, pp. 229-233, (1984)

[5]

Darafon A., Warkentin A., Bauer R., Characterization of grinding wheel topography using a white chromatic sensor, International Journal of Machine Tools and Manufacture, 70, pp. 22-31, (2013)

[6]

Darafon A., Measuring and modeling of grinding wheel topography, (2013)

[7]

Blateyron F., Chromatic Confocal Microscopy, pp. 71-106, (2011)

[8]

Dobson S.L., Sun P.C., Fainman Y., Diffractive lenses for chromatic confocal imaging, Applied Optics, 36, 20, pp. 4744-4748, (1997)

[9]

Hillenbrand M., Mitschunas B., Wenzel C., Et al., Hybrid hyperchromats for chromatic confocal sensor systems, Advanced Optical Technologies, 1, 3, pp. 187-194, (2012)

[10]

Ma X.J., Gao D.Z., Yang M.S., Et al., Measurement of thickness of metal thin film by using chromatic confocal spectral technology, Opt. Precision Eng., 19, 1, pp. 17-22, (2011)

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