Improvement in crystallinity of ZnO films prepared by rf magnetron sputtering with grid electrode

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[1] Yasui, Kanji
[2] Phuong, Nguyen Viet
[3] Kuroki, Yuichirou
[4] Takata, Masasuke
[5] Akahane, Tadashi
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Yasui, K. | 1600年 / Japan Society of Applied Physics卷 / 44期
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Thin films;
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