Performance and reliability improvement of low-power embedded flash memory with shallow trench isolation structure

被引：0

作者：

Huang, Heng-Sheng ^{[1
,3
]}

Su, Jason ^{[1
]}

Lee, Dong-Lung ^{[1
]}

Lin, Chih-Hung ^{[2
]}

Ting, Wen-Chi ^{[2
]}

Hong, Gary ^{[2
]}

机构：

[1] Institute of Mechatronics, National Taipei University of Technology, Taipei, Taiwan

[2] Specialty Technology Division, United Microelectronics Corporation, Hsin-Chu, Taiwan

[3] Institute of Manufacturing, National Taipei University of Technology, Taipei, Taiwan

来源：

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 2001年 / 40卷 / 2 A期

关键词：

D O I：

10.1143/jjap.40.551

中图分类号：

学科分类号：

摘要：

引用

页码：551 / 556