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Accurate roughness measurement using a method for evaluation and interpolation of the validity of height data from a scanning white-light interferometer
被引：0
|作者：
机构：
[1] Kim, Namyoon
[2] Lee, Seung Woo
[3] Yongjun, I.
[4] Pahk, Heui-Jae
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SNU;
Sponsor: Seoul National University;
IOER;
Sponsor: Institute of Engineering Research;
Seoul National University;
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摘要：
Interferometry
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