The characterization of surface acoustic wave modes on rotated Y-cut quartz (ST-X quartz) with different ALN film thickness

被引：0
|
作者：
Lee, Maw-Shung [1 ]
Chang, Feng-Chih [2 ]
Wu, Sean [2 ]
Wu, Long [2 ]
机构：
[1] Department of Electronic Engineering, National Kaohsiung University of Applied Sciences, Kaohsiung, Taiwan
[2] Department of Electrical Engineering, National Cheng Kung University, Tainan, Taiwan
来源：
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 2001年 / 40卷 / 07期
关键词：
High velocity pseudo-surface acoustic wave (HVPSAW) modes;
D O I：
10.1143/jjap.40.4590
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：4590 / 4592
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