The characterization of surface acoustic wave modes on rotated Y-cut quartz (ST-X quartz) with different ALN film thickness

被引：0

作者：

Lee, Maw-Shung ^{[1
]}

Chang, Feng-Chih ^{[2
]}

Wu, Sean ^{[2
]}

Wu, Long ^{[2
]}

机构：

[1] Department of Electronic Engineering, National Kaohsiung University of Applied Sciences, Kaohsiung, Taiwan

[2] Department of Electrical Engineering, National Cheng Kung University, Tainan, Taiwan

来源：

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 2001年 / 40卷 / 07期

关键词：

High velocity pseudo-surface acoustic wave (HVPSAW) modes;

D O I：

10.1143/jjap.40.4590

中图分类号：

学科分类号：

摘要：

引用

页码：4590 / 4592

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