共 50 条
- [21] Microcrystalline silicon by plasma enhanced chemical vapor deposition from silicon tetrafluoride JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 2001, 19 (02): : 515 - 523
- [22] CHEMICAL-VAPOR-DEPOSITION AND PLASMA-ENHANCED CHEMICAL-VAPOR-DEPOSITION CARBONIZATION OF SILICON MICROTIPS JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1994, 12 (02): : 633 - 637
- [26] Growth of crystalline silicon by a seed layer approach using plasma enhanced chemical vapor deposition Physica B: Condensed Matter, 2021, 609
- [27] Growth front roughening in silicon nitride films by plasma-enhanced chemical vapor deposition PHYSICAL REVIEW B, 2002, 66 (07):
- [28] Metal coatings on SiC nanowires by plasma-enhanced chemical vapor deposition Journal of Materials Research, 2005, 20 : 549 - 553
- [30] Ultrasharp Si nanowires produced by plasma-enhanced chemical vapor deposition PHYSICA STATUS SOLIDI-RAPID RESEARCH LETTERS, 2010, 4 (1-2): : 37 - 39