Optical free-form surfaces testing technologies

被引：21
|
作者：
Zhang L. [1 ]
Liu D. [2 ]
Shi T. [2 ]
Yang Y.-Y. [2 ]
Li J.-S. [1 ]
Yu B.-L. [1 ]
机构：
[1] Key Laboratory of Opto-electronic Information Acquisition and Manipulation Ministry of Education, Anhui University, Hefei
[2] State Key Lab of Modern Optical Instrumentation, Zhejiang University, Hangzhou
来源：
Zhang, Lei (optzl@ahu.edu.cn) | 1600年 / Editorial Office of Chinese Optics卷 / 10期
基金：
中国国家自然科学基金;
关键词：
Free-form surface testing; Interferometry; Rotationally asymmetric aberration compensation; Subaperture stitching;
D O I：
10.3788/CO.20171003.0283
中图分类号：
学科分类号：
摘要：
With great degrees of freedom, optical free form surfaces would provide the axial aberrations and off axis ones. Meanwhile, they meet requirements of modern optical systems in high-performance, light weight and micromation, and gradually becomes the hot topic in modern optical engineering. However, their applications have been limited by testing technology of optical free form surface. Most testing methods are still follow those of aspheric surfaces yet. In this paper, we introduce the mathematic description, fabrication and testing of free-form surfaces, especially focusing on several non-contact metrology, such as micro-lenses methods, 3D test with structured light, coherence tomography and interferometry. The technique difficult and development tendency stressing on flexible compensation for rotationally asymmetric aberration and subaperture stitching based on retrace error correction of the regional aberration are introduced as well. © 2017, China Science Publishing & Media LTD. All right reserved.
引用
收藏
页码：283 / 299
页数：16
相关论文
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