共 5 条
[1]
Uno Y., Okada A., Okamoto Y., Hirano R., Wire EDM slicing of monocrystalline silicon ingot, Proc. of 15th American Society for Precision Engineering Annual Meeting, (2000)
[2]
Okamoto Y., Uno Y., Okada A., Ohshita S., Hirano T., Takata S., Development of multi-wire EDM slicing method for silicon ingot, Proc. of American Society for Precision Engineering 2008 Annual Meeting and the 12th ICPE, (2008)
[3]
Itokazu A., Miyake H., Hashimoto T., Fukushima K., Multiwire electrical discharge slicing for silicon carbide part 2: Improvement on manufacturing wafers by forty-wire EDS, Materials Science Forum, 778, 780, (2014)
[4]
Okamoto Y., Suzuki A., Kimura A., Okada A., Kurihara H., Kido M., Development of simple power supplying system in multiwire EDM slicing method, Proceedings of 29th Annual Meeting of the American Society for Precision Engineering, (2014)
[5]
Okamoto Y., Ikeda T., Kurihara H., Okada A., Kido M., Multiwire EDM slicing of semiconductors with group power supplying method, Proc. of Euspen's 17th International Conference, (2017)