Nanomechanical characterisation of MEMS thin film materials

被引：0
|
作者：
He, J.H. [1 ,2 ]
Luo, J.K. [2 ,3 ]
Hopcroft, Matt A. [2 ]
Le, H.R. [2 ]
Moore, D.F. [2 ]
机构：
[1] Institute of Microelectronics, Singapore 117685
[2] Department of Engineering, University of Cambridge, Cambridge CB2 1PZ, Trumpington Street
[3] Centre for Material Research and Innovation, University of Bolton, Bolton BL3 5AB, Deane Road
来源：
International Journal of Computational Materials Science and Surface Engineering | 2009年 / 2卷 / 3-4期
关键词：
Cantilevers; Elastic modulus; Mechanical characterisation; MEMS; Nanoindentation; NEMS; Resonance frequency;
D O I：
10.1504/IJCMSSE.2009.027491
中图分类号：
学科分类号：
摘要：
Mechanical characterisation of thin film is crucial for development of MEMS/NEMS devices. A simple mechanical characterisation method is developed using a surface profilometer. Surface profilometer is used to scan along the micromachined cantilevers and produce the bending profile, from which the Young's modulus can be extracted. The following MEMS materials: SiN, Ni, Ni/SiN bimorph, Nanocrystal Diamond (ND), SiC have been characterised. The results are compared and in agreement with those obtained from nanoindentation and resonance frequency method. The advantages and disadvantages of these three methods are discussed. Copyright © 2009, Inderscience Publishers.
引用
收藏
页码：342 / 354
页数：12
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