Field-shield trench isolation with self-aligned field oxide

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作者：
Takase, Akihiro [1 ]
Kidera, Toshirou [1 ]
Sunami, Hideo [1 ]
机构：
[1] Takase, Akihiro
[2] Kidera, Toshirou
[3] Sunami, Hideo
来源：
Takase, A. (akihiro.takase@toshiba.co.jp) | 1600年 / Japan Society of Applied Physics卷 / 42期
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5
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页码：2100 / 2105
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