Study on fabrication process parameter estimation by visual measurement

被引：0
|
作者：
Takagi, Yuji [1 ,2 ]
Nakagaki, Ryo [1 ,2 ]
Shishido, Chie [1 ,2 ]
Tanaka, Maki [1 ,2 ]
机构：
[1] Hitachi, Ltd., Production Engineering Research Laboratory, 292 Yoshida-cho, Yokohama, Kanagawa 244-0817, Japan
[2] Hitachi, Ltd., Japan
来源：
IEEJ Transactions on Electronics, Information and Systems | 2007年 / 127卷 / 04期
关键词：
D O I：
10.1541/ieejeiss.127.630
中图分类号：
学科分类号：
摘要：
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页码：630 / 635
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