Study on fabrication process parameter estimation by visual measurement

被引：0

作者：

Takagi, Yuji ^{[1
,2
]}

Nakagaki, Ryo ^{[1
,2
]}

Shishido, Chie ^{[1
,2
]}

Tanaka, Maki ^{[1
,2
]}

机构：

[1] Hitachi, Ltd., Production Engineering Research Laboratory, 292 Yoshida-cho, Yokohama, Kanagawa 244-0817, Japan

[2] Hitachi, Ltd., Japan

来源：

IEEJ Transactions on Electronics, Information and Systems | 2007年 / 127卷 / 04期

关键词：

D O I：

10.1541/ieejeiss.127.630

中图分类号：

学科分类号：

摘要：

引用

页码：630 / 635

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